Dual Quartz Tubes Three Zones CVD Furnace Max 1200℃ for Growing Graphene Thin Films on Metallic Foil

Dual Quartz Tubes Three Zones CVD Furnace Max 1200℃ for Growing Graphene Thin Films on Metallic Foil

Product Name: Dual Quartz Tubes Three Zones CVD Furnace Max 1200℃ for Growing Graphene Thin Films

Product Model: OTF-1200X-III-D5-4

Product Description: The 1200℃ Dual-Tube Three-Zone Tube Furnace (for Graphene Growth) OTF-1200X-III-D5-4 has a maximum operating temperature of 1200℃ and is specifically designed for growing thin film materials on metal foils using the CVD method, such as graphene, electrode materials for solar cells, and other battery electrode materials.

Product Description

The 1200℃ Dual-Tube Three-Zone Tube Furnace (for Graphene Growth) OTF-1200X-III-D5-4 has a maximum operating temperature of 1200℃ and is specifically designed for growing thin film materials on metal foils using the CVD method, such as graphene, electrode materials for solar cells, and other battery electrode materials.

Product Features

1. The inner chamber surface is coated with imported high-temperature aluminum oxide, enhancing heating efficiency and extending the instrument's lifespan.

2. It features a dual-tube design, with metal foil attached to the inner tube during use.

3. A special vacuum flange allows the reaction gases to pass through the space between the two tubes, while cooling gases can flow through the inner tube for rapid cooling of the substrate.

4. It uses three PID controllers, allowing for the setup of a 30-segment heating and cooling program.

5. CE certified.

Product Parameters

Product Name	Dual Quartz Tubes Three Zones CVD Furnace for Growing Graphene Thin Films on Metallic Foil
Product Model	OTF-1200X-III-D5-4
Installation Conditions	This equipment is required to operate under the following conditions: temperature 25°C ± 15°C, humidity 55% Rh ± 10% Rh. 1. Water: The equipment is equipped with a self-circulating cooling water machine (fill with purified water or deionized water). 2. Electricity: AC 380V 50Hz (63A air switch), with proper grounding required. 3. Gas: The equipment chamber needs to be filled with argon gas (purity of 99.99% or higher); an argon gas cylinder must be provided (with a Ø6mm double ferrule connector). 4. Worktable: Dimensions of 1500mm × 600mm × 700mm, with a load capacity of over 200kg. 5. Ventilation System: Required.
Main Parameters	1. Power Supply: Single-phase AC 220V, 50/60Hz, 7KW (requires a 40A air switch). 2. Quartz Tube: - Outer tube outer diameter Ø130mm, inner diameter Ø122mm, length 1480mm. - Inner tube outer diameter Ø102mm, inner diameter Ø94mm, length 1540mm. 3. Heating Element: NiCrAl resistance wire. 4. Heating Zone: Total length 900mm, Zone I length 229mm, Zone II length 457mm, Zone III length 229mm. 5. Constant Temperature Zone: 625mm (all three zones set to the same temperature). 6. Operating Temperature: Max 1200℃, continuous operation at 1200℃. 7. Max Heating Rate: 20℃/min. 8. Temperature Control Accuracy: ±1℃.
Furnace structure	1. Three heating zones: (900mm, 36" in total) - Zone 1: 300mm (11.8") - Zone 2: 300mm (11.8") - Zone 3: 300 mm (11.8") 2. Max. 25" (625 mm) long with +/- 1°C accuracy if set three zones at the same temperature. 3. Three precision temperature controllers with 30 segment programmable and +/- 1° C accuracy. 4. Max. Working Temperature: 1200°C 5. Continuous Working Temperature: 1100°C 6. Heating Rate: <= 20°C /min 7. Constant Temperature Zone: 25" (625 mm) length (Three zones are heating at equal temperature simultaneously)
Processing Tubes	Two High purity Fused Quartz Tubes included Outside tube: 130mm O.D. x 122 mm I.D. x 1480 mm Inside tube: 102mm O.D. x 94 mm I.D. x 1800 mm
Vacuum sealed flanges	One pair of flange made of SS304, which seals tightly between tubes by two high-temperature O-rings (10-2 by the mechanical pump and 10-5 by the molecular pump ). The flange is built with water cooling jacket. When working temperature over 900°C, it is required to use cooling water. You may either use tap water or use our chilling water circulation at picture below One KF25 adapter is installed on the left flange to connect a vacuum pump. One stainless steel needle valve is installed on right flange
Dimensions	Dimensions: 1030mm × 430mm × 580mm; Weight: 90kg.