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Compact CVD Furnace Max 1200C with 2 Channel Gas Mixer, Vacuum Pump, and Vacuum Gauge for Laboratory

Product Name: ​CVD Tube Furnace Max 1200C with 2 Channel Gas Mixer, Vacuum Pump for Laboratory

Product Model: OTF-1200X-S50-2F

Product Description: ​OTF-1200X-S50-2F Mini CVD furnace is a CE Certified split tube furnace for heating samples up to 1200°C. A KF25 Gas Outlet and a Digital Vacuum Gauge are installed in the right flange for connection with a 226L/m Mechanical Pump (with Pump Filter). The left flange is used to connect a 2 channel gas mixing station through the 1/4" gas pipe.

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Product Description

OTF-1200X-S50-2F Mini CVD Furnace is a CE Certified split tube furnace for heating samples up to 1200°C. A KF25 Gas Outlet and a Digital Vacuum Gauge are installed in the right flange for connection with a 226L/m Mechanical Pump (with Pump Filter). The left flange is used to connect a 2 channel gas mixing station through the 1/4" gas pipe. The precision temperature controller will provide 30 segments of heating and cooling steps with +/- 1 °C accuracy. This furnace system also includes an anti-corrosive Pirani Capacitance Diaphragm Gauge to enable vacuum measurements with aggressive gases. In addition, you can get an accurate pressure reading with any mixed gases via the Digital Vacuum gauge. 

 

Product Parameters

Product Name

Compact CVD Furnace Max 1200C with 2 Channel Gas Mixer Vacuum Pump and Vacuum Gauge for Laboratory

Model

OTF-1200X-S50-2F

Structure

• Heavy-duty steel casing

• Energy-efficient Al2O3 fibrous thermal insulation

Power Consumption

• 1.75KW


Input Voltage

 AC110V (For using under AC 220V, please contact our tech. support team)

Temperature

 1200ºC Max. for < 1hr

 1100ºC  for continuously heating

 Heating rate <= 10C/min

Processing Tube  

Quartz tube: 50mm OD x 44mm ID x 600mm L

Heating Zone

 Total heating zone length: 8" (200mm); Constant temp. zone: 2.3" (60mm) (+/-1°C) @ 900 °C.

 The following picture left shows the temp. distribution across the heating zone.

 Two thermal blocks are included and must be placed inside the tube as shown picture below

Temp. Distribution.jpeg

Quartz tube block.jpg

Temperature Controller

 PID automatic control and auto-tune function.

 30 programmable segments for control of heating and rate cooling rate and dwell time.

 Overheating & broken thermocouple protection.

 Over-temperature protection and alarm allow for operation without attendant(s).

 +/- 1 ºC temperature accuracy. 

Two Channel Gas 

Mixing Station

 Two floating flow meters 16 to 100 mL/min flow rate range

 Three mechanical pressure gauges (mixing tank): -0.1-0.15 MPa, (0.01 MPa/grit)

 Vacuum needle valves are made of SS304

 Three Pipe fittings for 1/4" pipe (nylon or stainless steel) on the back panel

 Compact size:  340Lx300Dx 180H mm ( 13.4"x12"x7")

Temperature Controller

 PID programmable temperature controller

 Up to 50 temperature segments. 

 Control accuracy ±1°C

Vacuum Flanges 

and Fittings

 Vacuum fittings in standard package:

○ one Digital vacuum gauge w/ 0.00001 ~ 1000 torr measurement range

○ one 1/4" Swagelok tube connector

○ two KF-25 quick clamps

○ one 600mm length SS vacuum bellows

○ Structure (As shown in the figure below)

Right Flanges.jpg  left Flanges.jpg

Vacuum pump

 Double Stage Rotary Vane Vacuum Pump EQ-FYP-Pump (156L/m) with oil trap, Exhaust Filter,    Bellow& KF-D25 Inlet, and KF25 Clamp are included.

 Vacuum Pressure can reach 1E-2 Torr ( 50 m-Torr) 


Dimensions

Dimensions: 

 Furnace: 340 x 300 x 400 mm

 Vacuum Pump: 440 x 160 x 300 mm

 Gas Station: 340 x 300 x 180 mm


Warranty

One-year limited manufacturer's warranty (Consumable parts such as processing tubes, O-rings and heating elements are not covered by the warranty, please order replacements at related products below).

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CVD furnace OTF-1200X-S50-2F.jpg

Office Photo

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Exhibition

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