Product Name: Automated RTP Tube Furnace Max 1200C Max 6" for AI Material Research
Product Model: OTF-1200XS6-ASD
Product Description: OTF-1200XS6-ASD is a 6" OD automatic tube furnace up to 1200°C. It automates the pump-purge cycles, gas flow, heating, and cooling in a sequence via one click via PC.
Product Description
OTF-1200XS6-ASD is a 6" OD automatic tube furnace up to 1200°C. It automates the pump-purge cycles, gas flow, heating, and cooling in a sequence via one click via PC. With the assistance of a robot for sample loading and retrieval, it can operate autonomously 24×7 to accelerate next-generation material discovery. It also supports remote PC control, monitoring, and data logging to link up to 8 furnaces.
Product Parameters
Product Name | Automated RTP Tube Furnace Max 1200C Max 6" for AI Material Research |
Model | OTF-1200XS6-ASD |
Utility | • 208-240VAC, 50/60Hz, 6 kW • Recirculating chilled water |
Automation Process | • Sample loading (assisted by a robotic arm) • Pump-purge cycles • Steady gas flow • Heating, dwelling, and cooling • Sample retrieval (assisted by a robotic arm) |
Furnace | • Double-layer steel structure with a protective cover. • High-purity alumina fibrous insulation for better energy-saving • Motorized sliding sample stage for sample loading and retrieval. |
Working Temperature | <1100°C |
Heating Area | 350 mm, single-zone |
Heating Element | FeCrAl: Mo |
Heating Rate | ≦10°C/min |
Tube | Quartz, Ø150×600 mm |
Temperature Controller | • PID programmable temperature controller • Up to 50 temperature segments. • Control accuracy ±1°C |
Flange Set | • 304 stainless steel water-cooled flanges • Ø12 push-to-connect chilled water inlet/outlet • One 1/4" compression tube fitting each side as gas inlet and outlet • One 1/4" quick-connect port for in-situ temperature measurement • One KF25 port for vacuum generation |
Sample Stage | • A quartz sample stage with 4 cavities. • 4 quartz crucibles Ø40 × 30 mm (22 ml) • Crucibles in different materials, such as alumina, graphite, magnesia, are available upon request. • Wafer holders for 1-4" are also available upon request. • Customized sample holder is also available upon request. |
Control Panel & Software | • Free LabVIEW-based software for remote PC control, monitoring, and data logging • Ethernet TCP/IP communication port • PC operation software supports 8 sets of furnaces • One laptop with preinstalled software and communication cables. |
Dimensions | Dimensions: Dimensions: 1200mm (L) × 860mm (W) × 1000 mm (H) Weight:: 200 Kg |
Warranty | One-year limited manufacturer's warranty (Consumable parts such as processing tubes, O-rings and heating elements are not covered by the warranty, please order replacements at related products below). |
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Contact: Bruce Liu
WhatsApp: +86-18059149998
Tel: +86-18059149998
Email: sales@supsemi.com
Add: Room 1402, Building 1, No. 89 Xibeilu, Xishancun, Xibei Street, Xinluo District, Longyan City, Fujian Province
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