Welcome: Supsemi Electronic Technology Co., Ltd
sales@supsemi.com +86-18059149998

​Automated RTP Tube Furnace Max 1200C Max 6

Product Name: ​Automated RTP Tube Furnace Max 1200C Max 6" for AI Material Research

Product Model: OTF-1200XS6-ASD

Product Description: OT​F-1200XS6-ASD is a 6" OD automatic tube furnace up to 1200°C. It automates the pump-purge cycles, gas flow, heating, and cooling in a sequence via one click via PC.

EMAIL

Product Description

OTF-1200XS6-ASD is a 6" OD automatic tube furnace up to 1200°C. It automates the pump-purge cycles, gas flow, heating, and cooling in a sequence via one click via PC. With the assistance of a robot for sample loading and retrieval, it can operate autonomously 24×7 to accelerate next-generation material discovery. It also supports remote PC control, monitoring, and data logging to link up to 8 furnaces.  

Product Parameters

Product Name

Automated RTP Tube Furnace Max 1200C Max 6" for AI Material Research 

Model

OTF-1200XS6-ASD

Utility

• 208-240VAC, 50/60Hz, 6 kW

• Recirculating chilled water

Automation Process

• Sample loading (assisted by a robotic arm)

• Pump-purge cycles

• Steady gas flow

• Heating, dwelling, and cooling

• Sample retrieval (assisted by a robotic arm)


Furnace

 Double-layer steel structure with a protective cover. 

 High-purity alumina fibrous insulation for better energy-saving

 Motorized sliding sample stage for sample loading and retrieval.

Working Temperature

<1100°C

Heating Area  

350 mm, single-zone

Heating Element

FeCrAl: Mo

Heating Rate
≦10°C/min
TubeQuartz, Ø150×600 mm
Temperature Controller

 PID programmable temperature controller

 Up to 50 temperature segments. 

 Control accuracy ±1°C

Flange Set

 304 stainless steel water-cooled flanges

 Ø12 push-to-connect chilled water inlet/outlet

 One 1/4" compression tube fitting each side as gas inlet and outlet

 One 1/4" quick-connect port for in-situ temperature measurement

 One KF25 port for vacuum generation

Sample Stage

 A quartz sample stage with 4 cavities.

 4 quartz crucibles Ø40 × 30 mm (22 ml)

 Crucibles in different materials, such as alumina, graphite, magnesia, are available upon request.

 Wafer holders for 1-4" are also available upon request. 

 Customized sample holder is also available upon request.

Sample Stage.jpg

Control Panel & Software

 Free LabVIEW-based software for remote PC control, monitoring, and data logging 

 Ethernet TCP/IP communication port

 PC operation software supports 8 sets of furnaces

 One laptop with preinstalled software and communication cables. 

Control Panel & Software.png

Dimensions

Dimensions: 

Dimensions: 1200mm (L) × 860mm (W) × 1000 mm (H) 

Weight::  200 Kg


Warranty

One-year limited manufacturer's warranty (Consumable parts such as processing tubes, O-rings and heating elements are not covered by the warranty, please order replacements at related products below).

Automated Tube Furnace for AI Material Research.jpg

Automated Tube Furnace for AI Material Research.jpg

Office Photo

offce photo.jpg

Exhibition

Exhibition.png

Cooperative Partner.jpg

INQUIRY