Compact Single Zone CVD Furnace Max 1200C with 3 Channel Gas Mixer, Vacuum Pump, and Anti-Corrosive Vacuum Gauge

Product Name: Compact CVD Furnace Max 1200C with 3 Channel Gas Mixer, Vacuum Pump, and Anti-Corrosive Vacuum Gauge

Product Model: OTF-1200X-80-F3LV

Product Description: OTF-1200X-80-F3LV is a CE certified spiltable single zone tube furnace with 80mm diameter quartz tube, mechanical vacuum pump and three channel gas flowing system.

Product Description

OTF-1200X-80-F3LV is a CE certified spiltable single zone tube furnace with 80mm diameter quartz tube, mechanical vacuum pump and three channel gas flowing system. It can achieve a maximum vacuum up to 10-2 torr and mix 1-3 types of gases for CVD or diffusion. This furnace system also includes an anti-corrosive Pirani Capacitance Diaphragm Gauge to enable vacuum measurements with aggressive gases.

Product Parameters

Product Name	Compact CVD Furnace Max 1200C with 3 Channel Gas Mixer, Vacuum Pump, and Anti-Corrosive Vacuum Gauge
Model	OTF-1200X-80-F3LV
Structure	• Double layer steel casing with air cooling • Built-in thermostat automatically runs the cooling system when the case temp.>55°C
Power Consumption	• 2.5KW
Input Voltage	• AC 208-240V Single Phase, 50 or 60 Hz
Maximum Temperature	• 1200℃
Continuous workingTemperature	• 1100℃
Maximum Heating Rate	<= 20℃ /min
Heating Zone Length	400mm
Constant Temperature Zone	150mm (+/-1°C)
Temperature Accuracy	+/- 1°C
Heating Elements	Fe-Cr-Al Alloy doped by Mo
Tube Size and Materials	Quartz tube: OD: 80mm x ID: 75 mm x Length: 1000 mm
Digital Vacuum Gauge	• Corrosion-proof Capacitance Diaphragm Gauge with ceramic coated sensor head specially designed for vacuum measurements with presence of corrosive gases • Gauge is installed on the vacuum flange (right side) of tube furnace and provides a wide measure range (10^-5 ~ 1000 torr)
Temperature Controllers	• PID automatic control via SCR (Silicon Controlled Rectifier) power control with phase angle fired, current limiting resistor. • 30 programmable segments for precise control of heating rate, cooling rate and dwell time. • Please click here to learn why SCR is more accurate than SSC (Solid state relay). • Built-in PID Auto-Tune function with overheating & broken thermocouple protection. • Over temperature protection and alarm allows for operation without attendant(s). • +/- 1 ºC temperature accuracy. • RS485 Communications Port.
Vacuum Sealing Flanges	• Two stainless steel flanges with both vacuum gauge and valve. The leaking rate of the flange is 6 mtorr/min in max. and 2 mtorr/min in stable conditions. • Note: For the 24 hours curve display the time segment through 08:00:00~21:10:00 in X-axis is skipped over in the chart; therefore, a steep variance is present.
Dimensions	Dimensions: • Furnace: 550 x 380 x 520 mm • Bottom Mobile case: 600 x 600 x 597 mm
Warranty	One-year limited manufacturer's warranty (Consumable parts such as processing tubes, O-rings and heating elements are not covered by the warranty, please order replacements at related products below).