Splittable Single Zone Tube CVD Furnace 1200C With PTFE Flanges And Gas Mixer

Product Name: Splittable Single Zone Tube CVD Furnace 1200C With PTFE Flanges And Gas Mixer

Product Model: OTF-1200X-80-F3LV-PTFE

Product Description: OTF-1200X-80-F3LV-PTFE is a splittable single zone tube furnace with 80mm diameter quartz tube, mechanical vacuum pump and three channel gas flowing system. It can achieve a maximum vacuum up to 10-2 torr and mix 1-3 types of gases for CVD or diffusion.

Product Description

This furnace system features a PTFE gas system set to provide the anti-corrosive properties beyond stainless steel. The includes an anti-corrosive gauge, a vacuum pump with a cold trap, and the PTFE system. (Gas mixer and flange)

Product Parameters

Product Name	Splittable Single Zone Tube CVD Furnace 1200C With PTFE Flanges And Gas Mixer
Model	OTF-1200X-80-F3LV-PTFE
Structure	• Double layer steel casing with air cooling. • Built-in thermostat automatically runs the cooling system when the case temp. > 55°C. • Anti-corrosive gauge to enable vacuum measurements with aggressive gases. • Vacuum pump with cold trap prevents aggressive gases reaching the pump. • PTFE gas mixer and flange reduce aggressive gas contact to the susceptible surface.
Power Consumption	• 2.5KW
Input Voltage	• AC 208-240V Single Phase, 50 or 60 Hz
Maximum Temperature	• 1200℃
Continuous workingTemperature	• 1100℃
Maximum Heating Rate	<= 20℃ /min
Heating Zone Length	400mm
Constant Temperature Zone	150mm (+/-1°C)
Temperature Accuracy	+/- 1°C
Heating Elements	Fe-Cr-Al Alloy doped by Mo
Tube Size and Materials	Quartz tube: OD: 80mm x ID: 75 mm x Length: 1000 mm
Digital Vacuum Gauge	• Corrosion-proof Capacitance Diaphragm Gauge with ceramic coated sensor head specially designed for vacuum measurements with presence of corrosive gases • Gauge is installed on the vacuum flange (right side) of tube furnace and provides a wide measure range (10^-5 ~ 1000 torr)
Temperature Controllers	• PID automatic control via SCR (Silicon Controlled Rectifier) power control with phase angle fired, current limiting resistor. • 30 programmable segments for precise control of heating rate, cooling rate and dwell time. • Please click here to learn why SCR is more accurate than SSC (Solid state relay). • Built-in PID Auto-Tune function with overheating & broken thermocouple protection. • Over temperature protection and alarm allows for operation without attendant(s). • +/- 1 ºC temperature accuracy. • RS485 Communications Port.
Vacuum Sealing Flanges	• A set of PTFE flanges with both vacuum gauge and valve.
Vacuum Pump	• 156 L/m Double-Stage Rotary Vane Vacuum Pump is included with max. vacuum pressure of 10E-4 torr. • Stainless steel hose tube is included for connecting to tube furnace. • A cold trap is included to capture corrosive material.
Flow Meter & Pressure Meter	• One PTFE three-channel gas mixer is installed inside the mobile case to enable monitoring of gas flow rates.
Dimensions	Dimensions: • Furnace: 550 x 380 x 520 mm • Bottom Mobile case: 600 x 600 x 650 mm
Warranty	One-year limited manufacturer's warranty (Consumable parts such as processing tubes, O-rings and heating elements are not covered by the warranty, please order replacements at related products below).