Dual Zone Split Tube Furnace with Gas Mixer, Vacuum Pump, & Anti-Corrosive Vacuum Gauge for CVD or Diffusion

Product Name: Dual Zone Split Tube Furnace with Gas Mixer, Vacuum Pump, & Anti-Corrosive Vacuum Gauge for CVD or Diffusion

Product Model: OTF-1200X-II-F3LV

Product Description: OTF-1200X-II-F3LV is a
Dual Zone Split Tube Furnace with an 80mm diameter quartz tube, mechanical vacuum pump, and three-channel gas-flowing system. It can achieve a maximum vacuum up to 10-2 torr and mix 1-3 types of gases for CVD or diffusion.

Product Description

OTF-1200X-II-F3LV is a CE-certified and ready-to-pass UL/CSA certification Dual Zone Split Tube Furnace with an 80mm diameter quartz tube, mechanical vacuum pump, and three-channel gas-flowing system. It can achieve a maximum vacuum up to 10-2 torr and mix 1-3 types of gases for CVD or diffusion. This furnace system also includes an anti-corrosive Pirani Capacitance Diaphragm Gauge to enable vacuum measurements with aggressive gases.

Product Parameters

Product Name	Dual Zone Split Tube Furnace with Gas Mixer, Vacuum Pump, & Anti-Corrosive Vacuum Gauge for CVD or Diffusion
Model	OTF-1200X-II-F3LV
Furnace Construction	• Double-layer steel casing with air cooling. • The built-in thermostat automatically runs the cooling system when the case temp. > 55°C.
Power Consumption	• 2.5KW
Input Voltage	• AC 208-240V Single Phase, 50 or 60 Hz
Maximum Temperature	1200℃
Continuous workingTemperature	1100℃
Maximum Heating Rate	<= 20℃ /min
Heating Zone Length	Two Zones: 200 mm (8") for each zone and total 400 mm heating zone length
Constant Temperature Zone	• If two zones are set at the same temperature, constant temperature zone is 10" (250 mm) long with a temperature discrepancy of +/- 1°C. • If using only one zone (center zone), constant temperature zone is 4.3" (110 mm) long with a temperature discrepancy of +/- 1°C.
Max. Heating Rate	<= 20 °C /min (20 °C /min below 800°C; <5 °C /min over 1000°C)
Temperature Accuracy	+/- 1°C
Heating Elements	Fe-Cr-Al Alloy doped by Mo
Tube Size and Materials	Quartz Tube: 80 OD x 72 ID x 1000 L
Digital Vacuum Gauge	• Corrosion-proof Capacitance Diaphragm Gauge with ceramic coated sensor head specially designed for vacuum measurements with presence of corrosive gases • Gauge is installed on the vacuum flange (right side) of tube furnace and provides a wide measure range (10^-5 ~ 1000 torr)
Temperature Controllers	• PID automatic control via SCR (Silicon Controlled Rectifier) power control with phase angle fired, current limiting resistor. • 30 programmable segments for precise control of heating rate, cooling rate and dwell time. • Built-in PID Auto-Tune function with overheating & broken thermocouple protection. • Over temperature protection and alarm allows for operation without attendant(s). • +/- 1 ºC temperature accuracy. • RS485 Communications Port.
Vacuum Sealing Flanges	• Two stainless steel flanges with KF25 port, vacuum gauge, and valves included. • Min. vacuum pressure achieved by a mechanical pump is 5.5 m-torr. (5.5x10^-3 torr). • The pressure can reach 10^-5 torr using mechanical + molecular pumps. • The leaking rate is<5 m-torr/min and stable vacuum pressure after 24 hours is<2 torr.
Vacuum Pump	• 156 L/m Double Stage Rotary Vane Vacuum Pump with Exhaust Filter (220V single phase) and stainless steel hose tube are included for connecting to the tube furnace. Max. archivable vacuum pressure is 10^-2 torr. • Option: For precise control of the vacuum pressure, we recommend you choose our turn-key solution EQ-VPC-MV. This is a vacuum pressure regulating system with a motorized valve and gauge. It controls pressure range from 10^-6 torr ~ 760 torr.
Dimensions	Dimensions: • Furnace: 550 x 380 x 520 mm • Bottom Mobile case: 600 x 600 x 597 mm Each Weight: 60kg
Warranty	One-year limited manufacturer's warranty (Consumable parts such as processing tubes, O-rings and heating elements are not covered by the warranty, please order replacements at related products below).