1700C Three Zone Alumina Tube Furnace with Gas Mixer & Vacuum for CVD or Diffusion

GSL-1700X-60-III-F3LV

 Furnace Structure

• Double-layer steel casing with air cooling. Two cooling fans inside to keep the temperature of the outside case < 55℃.

• High-purity fibrous alumina insulation for Max, energy saving.

• Three independent heating zone via three precision temperature controllers.

Thermal Block Placement

Power Consumption

10 KW

Input Voltage

AC 208-240V Single Phase, 50/60 Hz

Heating Zone 

Three zones: total 25" (630 mm) heating zone (including two refractory separators)

Zone 1: 

• 7.5" (190 mm) heated by 4 pcs U type SiC

• Working temperature  800 - 1400°C

• Heating rate: 10°C/min

Zone 2: 

• 10" (250 mm) heated by 6 pcs U type MoSi2

• Working temperature 800 - 1700°C

• Max. Heating rate: 5°C/min

Zone 3: 

• 7.5" (190 mm) heated by 4 pcs U type SiC

• Working temperature  800 - 1400°C

• Max. Heating rate:  10°C/min

Tube Size and Flange

• 99.8% purity Alumina Tube

• 2-3/8" ( 60mm) O.D.x 2-1/8"I.D. (54mm) x 48" (1200mm) Length

• 60 mm stainless steel vacuum sealing flange with valve and meter is included

• Two porous ceramic blocks are included for protecting flange from heating radiation

Temperature Controller

• Three precision temperature controllers to control three zones separately.

• PID automatic control via SCR (Silicon Controlled Rectifier) power control with phase angle fired, current limiting resistor.

• 30 programmable segments for precise control of heating rate, cooling rate and dwell time.

• Built-in overheating & broken thermocouple protection.

• Over temperature protection and alarm allows for operation without attendant(s).

• +/- 1 ºC temperature accuracy.

• RS485 Communications Port.

Vacuum Gauge

• Corrosion-proof Capacitance Diaphragm Gauge with ceramic coated sensor head specially designed for vacuum measurements with the presence of corrosive gases.

• Gauge is installed on the vacuum flange (right side) of the tube furnace and provides a wide measure range (10^-5 ~ 1000 torr).

Vacuum Pump

• Heavy Duty Rotary Vane Vacuum Pump (7.8 CFM -240 L/m) with Two Stage Exhaust System installed inside the vacuum station. The vacuum system can reach 5x10^-2 torr within 30 minutes of pumping. ( 220V is available for the outside USA)

• One KFD25 adaptor is installed to the flange for connecting to the vacuum pump.

Three Channel Gas Mixing and Delivery System

          1) Compact direct read flow meter, 10-100 cc/min.

          2) Compact direct read flow meter, 16-160 cc/min.

          3) Compact direct read flow meter, 25-250 cc/min.

• One pressure meter is installed inside a mobile cart which are able to monitor the pressure of the mixing tank.

• 4 stainless steel needle valves are installed on the mobile cart

• Two gas-flowing pipes are provided for immediate use (one pipe from two mixed gases and another is independent gas) 

• Optional:  in order to control gas delivery accurately, you may choose three channel gas delivery system controlled by a precision digital mass flow meter at extra cost. 

Dimensions: 

• Furnace:   863 L x 457 W x 711 H mm (34 L x 18 W x 28 H  inch)

• Gas cart:  850 mm (L) x 600 mm  (W) x 700 mm ( H)

Weight: 150Kg (furnace) + 100Kg  ( total  550lb)

One-year limited manufacturer's warranty (Consumable parts such as processing tubes, O-rings and heating elements are not covered by the warranty, please order replacements at related products below).