1700C Single Zone Alumina Tube Furnace with Gas Mixer & Vacuum for CVD or Diffusion

Product Name: 1700C Single Zone Alumina Tube Furnace with Gas Mixer & Vacuum for CVD or Diffusion

Product Model: GSL-1700X-F3LV

Product Description: GSL-1700X-F3LV tube furnace is a CE certified alumina tube furnace with mechanical vacuum pump and three channels gas flowing system, which can heat the samples to 1700°C and achieve vacuum degree up to 5x10-2 torr and mix 1- 3 type of gases for CVD or diffusion.

Product Description

GSL-1700X-F3LV tube furnace is a CE certified alumina tube furnace with mechanical vacuum pump and three channels gas flowing system, which can heat the samples to 1700°C and achieve vacuum degree up to 5x10-2 torr and mix 1- 3 type of gases for CVD or diffusion. This furnace system also includes an anti-corrosive Pirani Capacitance Diaphragm Gauge to enable vacuum measurements with aggressive gasses.

Product Parameters

Product Name	1700C Single Zone Alumina Tube Furnace with Gas Mixer & Vacuum for CVD or Diffusion
Model	GSL-1700X-F3LV
Structure	• Double layer steel casing with air cooling. Two cooling fans inside to keep the temperature of the outside case < 55°C. • High purity fibrous alumina insulation for Maximum energy saving.
Power Consumption	5kW Max.
Input Voltage	AC 208-240V Single Phase, 50/60 Hz
Max. Heating Temp.	1700°C
Max. Heating Rate	5°C/min
Max. Cooling Rate	5°C/min
Heating Zone Length	455mm (18")
Constant Temp. Zone	150(+/-1C)
Temperature Accuracy	+/-1°C
Heating Elements	1800 grade MoSi2 (8 pcs)
Tube Materials and Size	• 99.8% high purity Al2O3 ceramic tube • ID: 73mm x OD: 80 mm x 1000 mm length
Digital Vacuum Gauge	• Corrosion-proof Capacitance Diaphragm Gauge with ceramic coated sensor head specially designed for vacuum measurements with the presence of corrosive gasses. • Gauge is installed on the vacuum flange (right side) of tube furnace and provides a wide measure range (10^-5 ~ 1000 torr).
Vacuum Sealing	• Two stainless steel flanges with a digital vacuum gauge and valves are included. • Vacuum pressure can reach 5x10-2 torr via the mechanical pump. • The leaking rate is 6 mtorr/min in max. and 2 mtorr/min when stable, click the picture. below to get details chart and data measured by CE certificated digital vacuum meter: (For a whole 24 hours curve display, the time segment through 08:00:00~21:10:00 in X-axis is passed over in the chart, therefore, steep variety in there)
Gas Flow Meter	• Three gas flowmeters ( 4% accuracy FS) are installed inside mobile case provide a monitor to gas flowing rates. 1) Compact direct read flow meter, 10-100 cc/min. 2) Compact direct read flow meter, 16-160 cc/min. 3) Compact direct read flow meter, 25-250 cc/min. • One pressure meter is installed inside mobile cart for monitoring the pressure of the mixed gas. • Four stainless steel needle valve are installed in the front panel to control the gas route independently.
Oxygen Monitoring	An Oxygen Sensor can be used to monitor the oxygen level of gas(es) used in CVD systems for preventing or reducing oxidation.
Dimensions	Dimensions: • 80 mm O.D Tube Furnace: 550 x 500 x 700mm L x W x H • Gas Mix Station: 600 x 600 x 700mm • Vacuum station: 600 x 600 x 700mm Weight: 450 lb (in total)
Warranty	One-year limited manufacturer's warranty (Consumable parts such as processing tubes, O-rings and heating elements are not covered by the warranty, please order replacements at related products below).