High-Precision Compact Czochralski Crystal Growth Furnace

Installation Conditions

This equipment requires operation within a temperature range of 25℃ ± 15℃ and a humidity range of 55%Rh ± 10%Rh.

1. Water: The equipment is equipped with a self-circulating chiller (fill with purified water or deionized water).

2. Electricity: AC380V 50Hz (63A air switch), a good ground connection is mandatory.

3. Gas: The equipment chamber requires filling with argon gas (purity 99.99% or higher). An argon gas cylinder with a Ø6mm double-ferrule fitting must be provided by the user.

4. Worktable: Dimensions 1500mm × 600mm × 700mm, with a load capacity of 200kg or more.

5. Ventilation: Required.

Main 

Parameters

1. Power Supply: Three-phase 380V, 25KW

2. Induction Radio Frequency: Power 25KW, frequency 0.2KHz-20KHz

3. Vacuum Chamber: Ø500mm × 700mm

4. Vacuum Level: 10⁻³ torr (mechanical pump), 10⁻⁵ torr (diffusion pump)

5. Maximum Pulling Stroke: 500mm

6. Pulling Speed: 0.1mm/h - 20mm/h

7. Seed Rod Rotation Speed: 0-40 rpm

8. Maximum Melting Temperature: 2100℃

9. Temperature Control Accuracy: < ±0.2℃

10. Cooling Water: Required water pressure 0.13MPa - 0.18MPa, required flow rate 60L/min

11. Movement Speed: Adjustable from 1mm/h to 10mm/h

12. Rapid Movement: Manual

13. Crystallization Rotation Speed: 1 rpm - 50 rpm

14. Vacuum System: Mechanical pump and diffusion pump

15. Ultimate Vacuum: 10⁻⁵ torr

Power 35 kW

Frequency 1-20 kHz

Duty cycle 100%

304 SS water-cooled vacuum chamber

Chamber size Ø500×700 mm

Observation window 80×300 mm

-0.1-0.5MPa mechanical diaphragm pressure gauge

1/4" gas inlet and outlet

Pressure relief valve, < 3 psig

3.75e-5 torr

Pyrometer for temperature measurement of the melt. 

Eurotherm 3000 series temperature controller

Travel distance 200 mm

Pulling speed 0.03 - 30 mm/hr

Rotation speed 1 - 60 rpm

Crucible System 

(Optional)

Maximum crucible size Ø100×80 mm

Maximum crystal size, Ø2"×100 mm

Please contact us for lager crystal growth, up to 4"

Cold Crucible 

Growth System 

(Optional)

The system is also compatible with cold crucible crystal growth for up to 2"

Additional cold crucible sample holder

Additional high-frequency induction power supply

Additional water chiller for cold crucible cooling only

Please contact us for details. 

Water Cooling 

(Optional)

Water cooling is optional but required.

MTI recommend getting KJ6500 water chiller

Cooling capacity 50000 Btu/hr or 14.5 kW

Water flow 100 L/min

1. Furnace Body: 880mm × 1250mm × 2850mm

2. Control Cabinet: 680mm × 540mm × 1700mm

3. Medium Frequency Cabinet: 1100mm × 500mm × 1500mm

4. Total Weight: 1500kg