Automated Vacuum UV Spin Coater for Semiconductor Wafer Thin Film Deposition

Automated Vacuum UV Spin Coater for Semiconductor Wafer Thin Film Deposition

Product Name: Automated UV Spin Coating Machine with Vacuum Chuck

Product Model: VTC-100PA-UV

Product Description: The VTC-100PA-UV UV Spin Coater is suitable for semiconductor processes, crystals, optical discs, plating, and surface coating applications. The chamber of the machine is made of polypropylene material, which is corrosion-resistant and has a long service life, allowing for coating with strong acid and strong alkaline solutions. The machine's top cover features UV lighting, making it particularly suitable for UV-sensitive colloids, enabling rapid curing of the coated colloid. Additionally, the UV lamp has a polymerization effect, allowing monomers to polymerize into polymer films.

Product Description

The VTC-100PA-UV UV Spin Coater, also known as a coater, glue machine, or spin coater, is suitable for semiconductor processes, crystals, optical discs, plating, and surface coating applications. The machine's chamber is made of polypropylene material, which is corrosion-resistant and has a long service life, allowing for coating with strong acid and strong alkaline solutions. The top cover features UV lighting, making it particularly suitable for UV-sensitive colloids, enabling rapid curing of the coated colloid. Additionally, the UV lamp has a polymerization effect, allowing monomers to polymerize into polymer films.

The center of the top cover has a liquid injection hole equipped with a rubber plug, which should be sealed when a closed environment is required. The chamber is equipped with an air inlet to introduce protective gas during the coating process. Samples are fixed using a vacuum adsorption method, making operation simple and allowing for easy placement and removal of samples.

A dedicated centering tool ensures that samples can be easily positioned at the center of the chuck, reducing vibrations caused by eccentricity and preventing wafer flying. Different sizes of chucks can be selected based on the size of the samples, and changing the chucks is simple and convenient. The machine uses a precision DC brushless motor that starts quickly and maintains stable speed, ensuring consistency and uniformity in coating thickness.

Product Features

1. Samples are securely fixed using a vacuum chuck, making placement and removal simple and convenient; the size of the vacuum chuck can be customized as needed.

2. The machine's top cover features UV lighting, with adjustable intensity within a certain range.

3. The center of the top cover includes a liquid injection hole equipped with an injection hole plug, which can be used to seal the hole when a closed environment is required.

4. The machine has a protective gas inlet for introducing protective gas into the chamber.

5. The motor and UV light control sections are powered by independent sources. The motor speed control system uses a single-board computer and an LCD display for intuitive and reliable numerical display; the UV lamp is controlled by a PLC controller with strong anti-interference capabilities.

6. The coating speed of the machine ranges from 500 to 1000 RPM, and it can store 12 program sets, each containing 6 operational stages. Parameters for each stage can be set independently, allowing the device to gradually increase speed to its maximum, which helps achieve uniform film formation on the sample surface without excessive waste, thus saving materials.

7. The UV lamp vacuum spin coater starts quickly and maintains stable rotation, ensuring uniformity and consistency in film thickness.

8. The design includes vibration-reduction measures to lower operational noise.

9. The chamber is made of polypropylene material, which extends its service life, enhances chemical corrosion resistance, and provides excellent stress crack resistance; the machine body is constructed from cast aluminum, making it sturdy, durable, and lightweight.

Product Parameters

Product Name

Automated UV Spin Coater with Vacuum Chuck System for Semiconductor Thin Film Deposition

Product Model

VTC-100PA-UV

Installation

Requirements

1. Temperature and Humidity: 10-85% RH (at 25℃, no condensation); Temperature: 0-45℃.

2. Surroundings: No strong vibration sources or corrosive gases in the vicinity of the equipment.

3. Water: Not required.

4. Electricity: Single-phase: AC 220V, 50Hz, national standard three-pin socket, 10A; must have good grounding.

5. Air: Vacuum negative pressure (vacuum pump); pumping flow rate not less than 70L/min (the equipment can introduce protective inert gas).

6. Worktable: Recommended size 800x600x700mm, with a load capacity of over 50kg (a solid concrete table is preferred).

7. Ventilation: No special requirements.

Main

Parameters

1. Power Supply Interface: Equipped with a fused power socket: AC 220V, 50Hz; fuse specifications are 10A, φ5×20mm (this equipment supports AC 110V, 50/60Hz for customized products).

2. Total Power: ≤180W (excluding external vacuum pump).

3. Coating Chamber Material: Polypropylene.

4. Sample Holder (Chuck): One polypropylene chuck each of Φ19mm and Φ60mm.

5. Operating Mode: Can store 12 program sets, each containing 6 operational stages.

6. Coating Speed: Effective range of 500rpm-10000rpm.

7. Acceleration/Deceleration Rate: Setting range for each stage's acceleration/deceleration: 100rpm — 2000rpm.

8. Coating Time: Time range for each stage: 0-60s.

9. Speed Stability: ±1%.

10. Main Control Method: PCB microcontroller with button control and LMC LCD display.

11. Curing Method: 16 LED UV lamp beads.

12. Curing Time: UV lamp time setting range: 1-800s.

13. Curing Power: UV lamp power range: 5-30W, adjustable.