High Purity Zirconium Zr Sputtering Target Customized

Zr Target Product Details

Zirconium (Zr) targets are materials used in the thin film deposition process, primarily composed of zirconium elements. Zirconium is a silver-gray, rare, soft, and ductile transition metal with a melting point of 2468°C and a density of 8.57 g/cm³. It exhibits a high melting point, good chemical stability, and excellent corrosion resistance, making it an ideal choice for manufacturing semiconductors, optoelectronic devices, and decorative films. As a target material, zirconium can produce high-purity zirconium vapor during processes such as physical vapor deposition (PVD), resulting in uniform, high-quality films.

Note: Purity, shape, thickness, and dimensions can all be customized,Please feel free to contact us for more details.

Zr Target Preparation Process

1. Material Preparation: Obtain high-purity zirconium raw materials.

2. Furnace Setup: Place the zirconium material in a furnace and introduce a protective gas (usually argon).

3. Furnace Heating: Heat the furnace to the melting point of zirconium (approximately 1852°C).

4. Furnace Cooling: Once the zirconium material is completely molten, gradually lower the furnace temperature to allow the zirconium to solidify.

5. Target Extraction: After the furnace cools, remove the zirconium target for further processing and treatment.

Applications of Zr Targets

Zirconium targets are primarily used to create thin films of metal oxides, metals, and alloys, which have significant applications in the semiconductor, optoelectronic, chemical, and life sciences fields. For example:

- In the semiconductor industry, zirconium targets are used to manufacture gate electrodes and metal interconnect layers in MOSFET devices.

- In the optoelectronic field, zirconium targets are utilized in the cathodes of electron beam evaporators and optical coatings.

Other Applications of Metallic Zirconium

- Nuclear Industry: Metallic zirconium is a crucial component of nuclear fuel rods, providing excellent corrosion resistance and mechanical strength, while also serving as fuel cladding material in nuclear reactors.

- Chemical Industry: Metallic zirconium is used as a material for chemical reaction vessels and pipelines, with outstanding corrosion resistance and high-temperature stability suitable for various chemical processes.

- Aerospace Industry: Metallic zirconium is employed in the manufacture of high-temperature components such as turbine blades and jet engine parts due to its high-temperature strength and low thermal expansion coefficient.

- Medical Devices: Metallic zirconium is used for artificial joints and dental implants, thanks to its excellent biocompatibility and mechanical properties.

- Electronics Industry: Metallic zirconium serves as packaging and electrode materials for electronic devices, offering superior electrical conductivity and high-temperature resistance.

Please provide detailed information about the target materials, such as purity, dimensions, tolerance requirements, and any other technical specifications, and we will promptly provide you with a quote and fast delivery.

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