Vacuum Probe Station Wafer Probing System for Gas Sensing Compact Cryogenic Probe Station Tips SUP-Z1604TZ

Brand: SUPSEMI

Product Number: SUP-Z1604TZ

This Vacuum Probe Station System Contains :

1. Vacuum Chamber;

2. Sample Stage;

3. Temperature Controller;

4. Probe;

5. Probe Positioning Stage;

6. Digital Microscope;

8. Vacuum gauge

The following are the technical specifications of each device.

Vacuum Chamber
Model	SUP-Z1604TZ High Temperature Type
Type	Heating type,from room temperature to 400 ℃
Material of the cavity	304 stainless steel
Internal dimensions of the cavity	diameter 160x90mm.
Window size on the cavity	Φ 68mm (optional concave window Φ 42mm)
Chamber exhaust port	KF40 or KF25, vacuum flange optional
Chamber air inlet	Metric 3mm 6mm tracheal connector, British system 1/8mm 1/4mm tracheal connector optional
Chamber outlet	8mm pagoda joint
Positive pressure of the cavity	≤ 0.05MPa;
Vacuum degree of chamber	Mechanical pump ≤ 5Pa (5 minutes); Molecular pump ≤ 5E-3Pa (30 minutes)

Sample Stage
Sample table material	304 stainless steel
Sample table size	Φ 60mm
Distance from sample stage to window	65mm (optional concave window spacing of 25mm)
Sample stage temperature sensor:	Class A PT100 platinum resistor
Sample stage temperature	from room temperature to 400 ℃
Sample stage temperature measurement error	± 0.5 ℃
Sample stage temperature change rate	high temperature 20 ℃/min

Temperature Controller
Temperature display	7-inch human-machine interface
Temperature control type	standard PID temperature control+self-tuning (optional 30 segment programming temperature control)
Temperature resolution	0.1 ℃
Temperature control accuracy	± 0.5 ℃
Temperature signal input type	PT100 thermistor (optional K S B thermocouple)
Temperature control output	DC linear power supply heating (liquid nitrogen flow rate linear control liquid nitrogen refrigeration)
Auxiliary function	temperature data collection and export real-time temperature curve+historical temperature curve

Probe
Electrical signal connector	wiring adapter ,BNC connector, BNC triple coaxial connector , SMA connector ,Banana plug, wire length 1.2 meters
Electrical performance	Insulation resistance ≥ 4000M Ω, dielectric withstand voltage ≤ 200V, current noise ≤ 10pA
Number of probes	4 probes (6 probes can be customized)
Probe material	gold-plated tungsten needle
Probe tip	10 μ m

Digital Microscope
Microscope Category	Objective Magnification+Electron Magnification
Microscope magnification	37.5-256 times
Microscope field of view range	7.58mmX5.69mm-1.39mmX1.11mm
Microscope working distance	100-95mm
Camera pixel	20 megapixel CMOS sensor
Camera pixel size	1.335 μ m X1.335 μ m
Camera resolution	1080P 60fps camera 5120X3840
Camera signal output	HDMI output+USB output
LED Adjustable Light Source	Circular Light Source
Display screen	13 inch IPS screen
Display input interface	HDMI

Vacuum gauge
model	PG800
Principle	heat conduction constant temperature type
measurement range	1E 5Pa -1E1Pa
measurement accuracy	1E-1-1E4Pa (± 10% reading), 1E4Pa-1E5Pa (± 20% reading)
Repeatability of vacuum gauge measurement	1E-1-1E4Pa (± 2% reading)