High and Low Temperature Vacuum High-Precision Semiconductor Probe Station with Electrical Probes Tips Cards Test Fixtures for Wafer Measurement Gas Testing

High and Low Temperature Vacuum High-Precision Semiconductor Probe Station with Electrical Probes Tips Cards Test Fixtures for Wafer Measurement Gas Testing

Brand: SUPSEMI

Product Number: SUP-Z1604T-RL

Product Description: SUP-Z1604T-RL Could adjust high and low temperatures (-190℃-400℃), Different with SUP-Z1604TZ.

This Vacuum Probe Station System Contains :

1. Vacuum Chamber;

2. Sample Stage;

3. Temperature Controller;

4. Probe;

5. Probe Positioning Stage;

6. Digital Microscope;

7. Vacuum pump;

8. Vacuum gauge

The following are the technical specifications of each device.

Vacuum Chamber
Model	SUP-Z1604T-RL (Could adjust high and low temperatures, Different with SUP-Z1604TZ)
Type	Heating and cooling type Room temperature to -190 ℃~400 ℃
Material of the cavity	304 stainless steel
Internal dimensions of the cavity	diameter 160x90mm.
Window size on the cavity	Φ 68mm (optional concave window Φ 42mm)
Chamber exhaust port	KF40 or KF25, vacuum flange optional
Chamber air inlet	Metric 3mm 6mm tracheal connector, British system 1/8mm 1/4mm tracheal connector optional
Chamber outlet	8mm pagoda joint
Positive pressure of the cavity	≤ 0.05MPa;
Vacuum degree of chamber	Mechanical pump ≤ 5Pa (5 minutes); Molecular pump ≤ 5E-3Pa (30 minutes)

Sample Stage
Sample table material	304 stainless steel
Sample table size	Φ 60mm
Distance from sample stage to window	65mm (optional concave window spacing of 25mm)
Sample stage temperature sensor:	Class A PT100 platinum resistor
Sample stage temperature	from room temperature to 400 ℃ or from room temperature to -190℃
Sample stage temperature measurement error	± 0.5 ℃
Sample stage temperature change rate	high temperature 20 ℃/min

Temperature Controller
Temperature display	7-inch human-machine interface
Temperature control type	standard PID temperature control+self-tuning (optional 30 segment programming temperature control)
Temperature resolution	0.1 ℃
Temperature control accuracy	± 0.5 ℃
Temperature signal input type	PT100 thermistor (optional K S B thermocouple)
Temperature control output	DC linear power supply heating (liquid nitrogen flow rate linear control liquid nitrogen refrigeration)
Auxiliary function	temperature data collection and export real-time temperature curve+historical temperature curve

Probe
Electrical signal connector	wiring adapter ,BNC connector, BNC triple coaxial connector , SMA connector ,Banana plug, wire length 1.2 meters
Electrical performance	Insulation resistance ≥ 4000M Ω, dielectric withstand voltage ≤ 200V, current noise ≤ 10pA
Number of probes	4 probes (6 probes can be customized)
Probe material	gold-plated tungsten needle
Probe tip	10 μ m

Probe Positioning Stage
X-axis travel	40mm ± 20mm
X-axis control accuracy	≤ 5 μ m
Y-axis travel	25mm ± 12.5mm
Y-axis control accuracy	≤ 5 μm
Z-axis travel	25mm ± 12.5mm
Z-axis control accuracy	≤ 5 μm

Digital Microscope
Microscope Category	Objective Magnification+Electron Magnification
Microscope magnification	37.5-256 times
Microscope field of view range	7.58mmX5.69mm-1.39mmX1.11mm
Microscope working distance	100-95mm
Camera pixel	20 megapixel CMOS sensor
Camera pixel size	1.335 μ m X1.335 μ m
Camera resolution	1080P 60fps camera 5120X3840
Camera signal output	HDMI output+USB output
LED Adjustable Light Source	Circular Light Source
Display screen	13 inch IPS screen
Display input interface	HDMI

Vacuum pump
model	VRD-8
pumping speed	8m ³/H
maximum pressure	0.1Pa,
power supply	110V - 220V
power	0.4KW
noise	≤ 52 dB
weight	21KG
oil volume	1L

Vacuum gauge
model	PG800
Principle	heat conduction constant temperature type
measurement range	1E 5Pa -1E1Pa
measurement accuracy	1E-1-1E4Pa (± 10% reading), 1E4Pa-1E5Pa (± 20% reading)
Repeatability of vacuum gauge measurement	1E-1-1E4Pa (± 2% reading)