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Versatile Wafer Plasma Cleaning Machine for Precision Vacuum Plasma System Cleaner in Semiconductor Surface Treatment Manufacturing Lab Reaserch SUP-Z5KQX

Brand: SUPSEMI

Product Model: SUP-Z5KQX

Product Descprition: The 40KHz plasma cleaning machine features a 5-liter compartment with solid-state power supply technology for enhanced efficiency.

It offers stable frequency control and an observation window for monitoring. Ideal for semiconductor, PCB, and surface activation applications, it serves both industrial and educational purposes.

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Product Details:

The working frequency of the 40KHz plasma cleaning machine is 40 kHz (40000 Hz). The cleaning machine has a built-in compartment volume of 5 liters and adopts a new appearance structure design and solid-state power supply technology, which increases its effective volume. It is easy to match under different vacuum gas environments and has stable control frequency.

The vacuum chamber door has an observation window, which can visually observe the processing of objects. As a precision dry cleaning equipment, it is mainly used for precision cleaning in industries such as semiconductors, coating processes, PCB processes, component packaging, COG, vacuum electronics, connectors, and relays. It is also used for surface activation of plastics, rubber, metals, and ceramics, as well as for teaching and experimental cleaning of life science samples.


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Basic Parameters

Power Supply

AC220V (AC110V optional)

Operating Current

Maximum 3.5A (excluding vacuum pump)

Plasma Power

300W adjustable

Coupling Method

Capacitive coupling

Vacuum Degree

≤30Pa

Chamber Volume

5L (Inner diameter 152mm x Depth 280mm)

Load Specification125mm x 260mm

Observation Window Inner Diameter

Φ50

Gas Flow Rate

0—50ml/min (other ranges optional)

Gas Channels

2-channel mass flow meter + precision flow control valve

Process Control

Automatic control

Cleaning Time

Manual switch

Cover Opening Method

Hinge side-opening flange

Dimensions

450 x 450 x 250 mm

Vacuum Chamber Temperature

Less than 65°C

Cooling Method

Forced air cooling


Basic equipment and accessories:

1. One plasma cleaning machine ;

2. KF16 vacuum tube 1 meter ;

3. One stainless steel mesh box ;

4. Two KF16 clamps ;

5. One mechanical pump ;

6. One power cord ;

7. One manual

Office Photo

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Exhibition

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