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Wafer Vacuum Plasma Cleaner Semiconductor Cleaning System Machine Surface Equipment Surface Modification for Lab University

Brand Name: Supsemi

Product Number: SUP-20

Product Details: Controlled by PLC+ touch screen, easy to operate,Unique electrode structure to ensure the uniformity of plasma,suitable for small-scale production and scientific experiments.

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Product Description:

We have 12 years of experience in the research and development of plasma surface treatment machines. This product is suitable for small-scale production and scientific experiments.


Input Voltage
AC220V(110V Option)
Frequency40 kHz/13.56 MHz
Power100-300W
Control SystemPLC+Touch Screen
Outline Dimension600(L) *560(W) * 600mm(H)
Vacuum Chamber20-30 L (Support customization,OEM)
Material of VacuumSUS 316
Dimension of Vacuum Chamber250*320*500 mm
Weight55 kg
Gas PassageAvailable Gas: Ar, O2, N2,Air(optional)

Product Details:

* Controlled by PLC+ touch screen, easy to operate

* The cavity is corrosion-resistant and can be customized according to customer needs

* Imported needle valve precision flow control meter, tow process reaction gas channels

* Unique electrode structure to ensure the uniformity of plasma

* Low cost 

* Energy saving and environmental protection 

* Easy operation

* After plasma treatment, the dyne can reached 60

* No welding required, parts can be easily attached

* Color, size and logo can be customized

* A wide range of applications, regardless of processing objects and basic materials


* All-round processing, no dead ends

* High efficiency, more products can be cleaned at one time

* Two-way process gas configuration, Ar, O2, N2, Air is optional

* Product uniformity and durability

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