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Compact Plasma Cleaner - Advanced Surface Treatment Equipment for Effective Cleaning Solutions

Product Name:SUP-PCE-6V Small Lab Plasma Cleaning Machine

Product Model:SUP-PCE-6V

Product Description: The SUP-PCE-6V small plasma cleaning machine integrates RF plasma generation technology, computer control technology, and software programming technology. It uses gas as the cleaning medium, effectively avoiding secondary pollution of the cleaned object caused by liquid cleaning medium.

When working, an external vacuum pump is connected, and the plasma in the cleaning chamber gently flushes the surface of the object to be cleaned, which can thoroughly remove organic pollutants in a short period of time, and the cleaning degree can reach the molecular level.

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Product Description:

The sample stage of SUP-PCE-6V small plasma cleaning machine can be equipped with heating function and negative bias voltage to achieve ion etching of the sample. In addition, it can change the surface properties of certain materials as needed under specific conditions. The device is small in size, easy to operate, and widely used.


Product Features:

1. Using gas as the cleaning medium avoids secondary pollution caused by liquid cleaning medium on the cleaned object.

2. It can thoroughly clean organic pollutants in a short period of time.

3. The degree of cleaning can reach the molecular level.

4. The surface properties of certain materials can be changed as needed under specific conditions.

5. The glow discharge during the cleaning process can enhance the adhesion, compatibility, and wettability of certain materials for special purposes.

6. The sample stage can be equipped with heating function and negative bias voltage to achieve ion etching.

7. Widely used in semiconductor, optics, optoelectronics, electronics, materials science, life sciences, polymer science, biomedical, microfluidics and other fields.


Product Parameters:

Product NameSUP-PET-6V Small Lab Plasma Cleaner Cleaning Machine
Product Model
SUP-PET-6V 
Parameters

1. Voltage: AC220V 10A (110V optional)

2. Power consumption: <500W (including vacuum pump)

3. RF power supply: output power of 100W, output frequency of 13.56MHz

4. Chamber: Ø 190mm × 98mm

5. Quartz tube: Ø 180mm × 55mm, wall thickness 7mm

6. Inner cavity: Ø 165mm × 55mm

7. Cleaning electrode: Ø 120mm

8. Sample stand: Ø 150mm, effective size Ø 140mm

9. Distance between sample stage and electrode: adjustable from 15mm to 50mm

10. Exhaust tube: Ø 12mm

11. Ultimate vacuum degree: 0.1Pa

12. Working vacuum degree: 60Pa-500Pa

13. Number of gas paths: 2 (optional)

14. Number of flow controllers: 1, 2

15. Flow display instrument: 2 channels

16. Air interface: Ø 6mm

17. Heating sample stage: Ø 100mm, heating sample temperature 200 ℃ -500 ℃ (optional)

18. Cooling water pressure: 0.2KPa-0.4KPa

19. Working environment: temperature 5 ℃ -35 ℃, humidity<80% (relative humidity), 

      no condensation

Product Specifications


Dimensions: 245mm × 235mm × 460mm (excluding vacuum pump)

Weight: 20kg (excluding vacuum pump)

<a href=https://www.supsemi.com/en/Plasma-Cleaner.html target='_blank'>Plasma Cleaner</a> Size.jpg


Optional Accessories:

Item No.Product NameNote
1Heated Sample StageOptional
2

Flow controller (range 10, 50, 100, 

can increase the number of channels ≤ 2)

Optional

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