Product Name:SUP-PCE-6V Small Lab Plasma Cleaning Machine
Product Model:SUP-PCE-6V
Product Description: The SUP-PCE-6V small plasma cleaning machine integrates RF plasma generation technology, computer control technology, and software programming technology. It uses gas as the cleaning medium, effectively avoiding secondary pollution of the cleaned object caused by liquid cleaning medium.
When working, an external vacuum pump is connected, and the plasma in the cleaning chamber gently flushes the surface of the object to be cleaned, which can thoroughly remove organic pollutants in a short period of time, and the cleaning degree can reach the molecular level.
Product Description:
The sample stage of SUP-PCE-6V small plasma cleaning machine can be equipped with heating function and negative bias voltage to achieve ion etching of the sample. In addition, it can change the surface properties of certain materials as needed under specific conditions. The device is small in size, easy to operate, and widely used.
Product Features:
1. Using gas as the cleaning medium avoids secondary pollution caused by liquid cleaning medium on the cleaned object.
2. It can thoroughly clean organic pollutants in a short period of time.
3. The degree of cleaning can reach the molecular level.
4. The surface properties of certain materials can be changed as needed under specific conditions.
5. The glow discharge during the cleaning process can enhance the adhesion, compatibility, and wettability of certain materials for special purposes.
6. The sample stage can be equipped with heating function and negative bias voltage to achieve ion etching.
7. Widely used in semiconductor, optics, optoelectronics, electronics, materials science, life sciences, polymer science, biomedical, microfluidics and other fields.
Product Parameters:
Product Name | SUP-PET-6V Small Lab Plasma Cleaner Cleaning Machine |
Product Model | SUP-PET-6V |
Parameters | 1. Voltage: AC220V 10A (110V optional) 2. Power consumption: <500W (including vacuum pump) 3. RF power supply: output power of 100W, output frequency of 13.56MHz 4. Chamber: Ø 190mm × 98mm 5. Quartz tube: Ø 180mm × 55mm, wall thickness 7mm 6. Inner cavity: Ø 165mm × 55mm 7. Cleaning electrode: Ø 120mm 8. Sample stand: Ø 150mm, effective size Ø 140mm 9. Distance between sample stage and electrode: adjustable from 15mm to 50mm 10. Exhaust tube: Ø 12mm 11. Ultimate vacuum degree: 0.1Pa 12. Working vacuum degree: 60Pa-500Pa 13. Number of gas paths: 2 (optional) 14. Number of flow controllers: 1, 2 15. Flow display instrument: 2 channels 16. Air interface: Ø 6mm 17. Heating sample stage: Ø 100mm, heating sample temperature 200 ℃ -500 ℃ (optional) 18. Cooling water pressure: 0.2KPa-0.4KPa 19. Working environment: temperature 5 ℃ -35 ℃, humidity<80% (relative humidity), no condensation |
Product Specifications | Dimensions: 245mm × 235mm × 460mm (excluding vacuum pump) Weight: 20kg (excluding vacuum pump) |
Optional Accessories:
Item No. | Product Name | Note |
1 | Heated Sample Stage | Optional |
2 | Flow controller (range 10, 50, 100, can increase the number of channels ≤ 2) | Optional |
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Contact: Bruce Liu
WhatsApp: +86-18059149998
Tel: +86-18059149998
Email: sales@supsemi.com
Add: Room 1402, Building 1, No. 89 Xibeilu, Xishancun, Xibei Street, Xinluo District, Longyan City, Fujian Province
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