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Lab Vacuum Plasma Cleaner Wafer Cleaning Machine Surface Activation Unit Degreasing and Activation System Equipment

Product Name: Vacuum Plasma Cleaner for Lab

Product Model: SUP-S2DQX

Brand Name: Supsemi

Product Description: This plasma cleaning machine can be used for laboratory sample cleaning, sample modification, activation, and increasing sample adhesion.

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Product Details:

The SUP-S2DQX plasma cleaning machine is a RF power supply of 150W 13.56MHz. 

As a precision dry cleaning equipment, it is mainly used for precision cleaning in industries such as semiconductors, coating processes, PCB processes, component packaging, COG, vacuum electronics, connectors, and relays. 

The vacuum chamber door has an observation window, which can directly observe the processing process of the object. Its RF power supply and control are assembled in one chassis, which reduces the space occupied and is more convenient for operation and placement.

At the same time, compared with large cleaning machines, the detection function and control function settings can be operated on one panel, which is particularly suitable for scientific experiment sample cleaning and teaching.


Parameters:

Power supply

AC220V (110V optional)

Working current

The working current of the whole machine is not more than 3.5A (excluding vacuum pump)

RF power supply power

150W

Cleaning frequency

13.56MHz

Frequency offset: 

<0.2MHz

Characteristic impedance: 

50 ohms, manual matching

Coupling mode

capacitive coupling

Vacuum degree

≤50Pa

Cavity material

high-purity quartz

Cavity volume

2L (inner diameter 110MMX depth 220MM)

Observation window inner diameter

Φ65

Gas flow rate

0-50ml/min (thermal mass flow sensor * 2)

Process control

automatic switching

Cleaning time

timer switch

Opening method

hinged side opening flange

Dimensions

about 450x460x300mm

Weight

23Kg

Vacuum chamber temperature

 less than 65°C

Cooling method

forced air cooling

Standard configuration

1 meter KF16 vacuum tube, 2 kf16 clamps, 1 stainless steel 

mesh box, a power cord, and an instruction manual.



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