Product Name: Vacuum Plasma Cleaner for Lab
Product Model: SUP-S2DQX
Brand Name: Supsemi
Product Description: This plasma cleaning machine can be used for laboratory sample cleaning, sample modification, activation, and increasing sample adhesion.
Product Details:
The SUP-S2DQX plasma cleaning machine is a RF power supply of 150W 13.56MHz.
As a precision dry cleaning equipment, it is mainly used for precision cleaning in industries such as semiconductors, coating processes, PCB processes, component packaging, COG, vacuum electronics, connectors, and relays.
The vacuum chamber door has an observation window, which can directly observe the processing process of the object. Its RF power supply and control are assembled in one chassis, which reduces the space occupied and is more convenient for operation and placement.
At the same time, compared with large cleaning machines, the detection function and control function settings can be operated on one panel, which is particularly suitable for scientific experiment sample cleaning and teaching.
Parameters:
Power supply | AC220V (110V optional) |
Working current | The working current of the whole machine is not more than 3.5A (excluding vacuum pump) |
RF power supply power | 150W |
Cleaning frequency | 13.56MHz |
Frequency offset: | <0.2MHz |
Characteristic impedance: | 50 ohms, manual matching |
Coupling mode | capacitive coupling |
Vacuum degree | ≤50Pa |
Cavity material | high-purity quartz |
Cavity volume | 2L (inner diameter 110MMX depth 220MM) |
Observation window inner diameter | Φ65 |
Gas flow rate | 0-50ml/min (thermal mass flow sensor * 2) |
Process control | automatic switching |
Cleaning time | timer switch |
Opening method | hinged side opening flange |
Dimensions | about 450x460x300mm |
Weight | 23Kg |
Vacuum chamber temperature | less than 65°C |
Cooling method | forced air cooling |
Standard configuration | 1 meter KF16 vacuum tube, 2 kf16 clamps, 1 stainless steel mesh box, a power cord, and an instruction manual. |
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Contact: Bruce Liu
WhatsApp: +86-18059149998
Tel: +86-18059149998
Email: sales@supsemi.com
Add: Room 1402, Building 1, No. 89 Xibeilu, Xishancun, Xibei Street, Xinluo District, Longyan City, Fujian Province
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