Small Lab PVD Magnetron Sputtering Vacuum Coating Machine

Product Name: DC Sputtering Deposition Systems for Nano-scale Semiconductor Applications

Prodcut Model: SUP-Z1650-PVD

Brand Name: supsemi

Product description: This machine is capable of coating thin films of gold (Au), palladium (Pd), platinum (Pt), and gold/palladium (Au/Pd) on non-conductive or poorly conductive samples.Suitable for small-scale experiments in colleges and enterprises.

The SUP-Z1650PVD is a compact, tabletop Magnetron Sputtering System with adjustable power.

Despite its small size, the instrument is feature-rich, equipped with voltage and current feedback, a rotating sample stage, sample height adjustment, and an automated shutter.

By precisely controlling the pre-sputtering power and the deposition power through timed adjustment, it can uniformly deposit a variety of metal thin films.

The transparent quartz vacuum chamber minimizes sample contamination, and the rotating sample stage ensures even film deposition. This versatile system can be used to fabricate various metal thin film coatings.

Product Parameters:

Equipment name	Small Sputtering Instrument
Control mode:	7-inch human-machine interface manual automatic mode switching control
Working power supply:	DC sputtering power supply
Coating function:	0-999 seconds 5-stage adjustable power, baffle position, and sample speed program
Power supply:	≤ 1000W
Output voltage:	Voltage ≤ 1000V
Output current:	current ≤ 500mA (adjustable current size)
Vacuum:	Mechanical pump ≤ 5Pa (5 minutes) Molecular pump ≤ 5 * 10 ^ -3Pa
Sputtering vacuum:	≤ 10Pa
Type of baffle:	Electric control
Vacuum chamber:	high boron glass+stainless steel chamber with a diameter of 160mm x 170mm
Sample stage:	rotatable with a diameter of 75 (capable of installing a diameter of 70 substrate)
Sample table speed:	8 revolutions per minute
Sample sputtering source adjustment distance:	40-105mm
Vacuum measurement:	Pirani vacuum gauge (installed measurement range 10E5Pa 1E-1Pa)
Reserved vacuum interface:	KF25 suction port, KF16 vent port, 6mm card sleeve inlet port
Water cooling interface:	Yes (equipped with self circulating water cooler)
Film thickness gauge (optional):	Thickness range 0-9999A Thickness display resolution 1A Speed range 0-999.9A Rate display resolution 0.1A Crystal oscillator frequency 5-6MHz