Compact Plasma Cleaner for Semiconductor Wafer Surface Treatment

Product Name: Small Lab Plasma Cleaner

Model: SUP-PCE-8

Product Description: The SUP-PCE-8 plasma cleaning machine is a relatively large plasma cleaning machine, with a Ø 8.5 "× 12" quartz chamber and a continuously adjustable RF power supply ranging from 0 to 100W. The RF frequency used is 13.56MHz.

This machine mainly uses plasma of gases such as air, oxygen, or argon to remove the oxide layer and pollutants on the substrate, and can also change the properties of the object surface (such as hydrophilicity and hydrophobicity). It is an ideal equipment for substrate cleaning and thin film treatment.

Product Features

1. Adopting a 6 "color touch screen, it can control RF power, cleaning time, gas flow rate, vacuum pump on, etc.

2. Internally equipped with a mass flow meter ranging from 0-500mm/min, it can accurately control the intake flow rate.

Product Parameters

Product Name	Compact Plasma Cleaner for Semiconductor Surface Treatment
Product Model	SUP-PCE-8
Main Parameters	1. Power supply: AC220V (110V optional) 2. RF power: up to 100W, adjustable between 0-100W 3. Vacuum pump power:<500W 4. Total power:<600W 5. RF: 13.56MHz 6. Plasma chamber: high-purity quartz chamber, outer diameter Ø 8.5 ", inner diameter Ø 8.2", length 12 ", using aluminum folding flange for vacuum sealing, with a Ø 60mm observation window on the flange 7. Ultimate vacuum degree: 50mtorr 8. Gas injection: Multiple gases can be introduced, such as N2, Ar, Air, H2, O2, and mixed gases, etc. (depending on the material properties) Cleaning and etching
Product specifications	dimensions：620mm×450mm×600mm

Optional Accessories

Item No.	Product Name	Note
1	300W and 600W RF power supplies (for experiments such as plasma etching and plasma ashing)	Optional
2	2"-6" Quartz Boat (for holding substrates)	Optional
3	2-4 Channel Floater Gas Mixing System	Optional
4	2-4 Channel Proton Gas Mixing System	Optional
5	Direct-Connected Dual Rotary Vacuum Pump (240L/min)	Optional
6	KF25 Corrugated Pipe	Optional
7	KF25 Manual Shut-Off Valve	Optional