What is a Cassette in a Semiconductor Fab?

In a semiconductor factory, a "cassette" refers to a type of wafer carrier. It is commonly known as a wafer boat, carrier box, or material box.

From a functional perspective, it is primarily used to hold and protect semiconductor wafers. Wafers are the essential materials for chip manufacturing and are thin and brittle. The cassette securely holds the wafers in place, preventing physical damage from external factors such as collisions or scratches, ensuring the safety of the wafers during transportation, storage, and processing.

In terms of usage scenarios, cassettes are utilized at various stages of semiconductor manufacturing processes, such as photolithography, etching, and ion implantation. They play a crucial role in transporting and transferring wafers between different equipment. Different process equipment may have specific interface requirements for cassettes to ensure precise reception and placement of the wafer carrier boxes.

From a material and design perspective, cassettes are typically made from anti-static materials, as the semiconductor manufacturing process is highly sensitive to static electricity, which can damage the intricate circuit structures on the wafers. The internal structure of the cassette is designed to accommodate the size of the wafers it carries (such as common 8-inch or 12-inch wafers), featuring appropriate slots or securing mechanisms to ensure the stability of the wafer placement.

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