1700C Max. Hydrogen Gas Box Furnace 65L

• Heated chamber: 400x 400x 400 mm (16x16x16 inch), 65 Liter (Max.)

• Energy-saving 1800-grade fibrous alumina insulation

• Sealed by stainless steel with water-cooling

• Three sides heating ( Left， right and back ) to ensure the best temperature uniformity.

• SiC plate is installed on the bottom, which has 100kg, Max. loading. 

Heating Elements

• 9 sets of Mo coils heating elements are built-in and replaceable 

   - The Mo heating element is consumable. You may order spare element by click Pic. 1 below

   - Warning:   Mo heating element can not be used under air or oxygen at the temperature > 300°C

• The heating element can be replaced by 1900 grade MsSi2 to run the furnace under oxygen and air and Inert gases up to 1700°C

Power

36KW

Voltage

AC 208 - 240V three phases (50/60 Hz) 

Current

80 Amp (100 Amp air breaker is required)

Continuous Working 

Temperature

1650° C    ( in H2 gas or Ar gas, not recommended under N2 gas )

Gas Flow and 

Vacuum Valve

• Two large flow meters (N2: 0~3.5L/min, H2: 0~3.5L/min) are installed on the front panel of the furnace.

• One for purging Inert gas prior to introducing H2 gas

• One for controlling H2 gas flow

• One heavy-duty vacuum pump (CE certified) built-in bottom furnace to enhance the purging chamber.

Maximum Working 

Temperature

1700°C (< 1 hr)   ( in H2 gas or Ar gas, not recommended under N2 gas )

Temperature Control

and

Processing control

• Temperature and processing control via touch screen computer, including

• Temperature control with +/- 1ºC  accuracy.

   - Two thermal couples are built-in: one for temperature control and one for safety monitoring 

   - 30 programmable segments for precise control of heating rate, cooling rate, and dwell time.

   - Over-temperature protection by an independent controller

   - Recording and display temperature profile during operation

• Processing control includes：

   - Purging procedure for the furnace chamber

   - Chamber pressure control

   - Gas flow control

   - Recording and display pressure profile during operation

• Gas Flow Control and Vacuum ValveTwo large flow meters (N2: 0~ 12L/min, H2: 0~12L/min) are installed in the front panel of the furnace.

• One for purging Inert gas prior to introducing H2 gas

• One for controlling H2 gas flow

• KF40 vacuum pumps built-in to connect a vacuum pump

• The vacuum pump may be needed, but not included

Dimension

• 1600X1320X2100 mm  ( not including transformer and water chiller)

• 680X550X730 mm  ( transformer )

Net Weight

990kg

One-year limited warranty with lifetime support.  (Consumable parts such as sample plates and heating elements are not covered by the warranty, please order the replacement for related products below.)

ATTENTION: Any damages caused by the use of corrosive and acidic gases are not under the coverage of SUPSEMI One Year Limited Warranty.

H2 Gas Burning 

Control System

• An ignition device is already installed to incinerate flowing gas and detect burner temperature to ensure H2 burner is in working condition. If H₂ does not burn properly, the controller will shut down the H₂ gas delivery valve immediately.

• Warning: You must install a certified Hydrogen detector in the operation facility to alarm for hydrogen leaking by accident. 

• The pressure inside the chamber should ALWAYS be controlled at 0.01-0.02 Mpa above the standard atmospheric pressure during the entire heating process, otherwise, the oxygen in the air may backflow into the furnace chamber and cause an explosion in the worst-case scenario.

• ALWAYS place the furnace in a room with the fume hood and a hydrogen detector installed.

• Good ventilation is necessary for the room in which the furnace

• Exhausting Hydrogen gas in the room is forbidden.