Advanced High-Precision Semiconductor Probe Station for Laboratory Microprobe Automated Wafer Testing and Electrical Measurements

Advanced High-Precision Semiconductor Probe Station for Laboratory Microprobe Automated Wafer Testing and Electrical Measurements

Brand: SUPSEMI

Product Model: SUP-Z165M4RT

Product Details: This machine compact vacuum chamber test chamber is mainly used for gas sensitive materials or other environmentally sensitive materials.

The electrical signal testing in materials is very suitable for laboratory use.

Product Details:

1. The test chamber is equipped with a stainless steel heating platform, with a surface size of φ26x26 mm.

2. The platform can reach a maximum temperature of 400℃ and can be cooled to a minimum of -190℃.

3. Surrounding the platform are miniature three-axis movable tungsten steel probes, which are particularly suitable for testing small, unpackaged forked electrode sensors.

4. The chamber is designed with an air inlet and a vacuum exhaust interface, achieving a vacuum level of <5Pa with a mechanical pump and < -3Pa with a molecular pump.

5. Military-grade vacuum electrode signal connectors are used at the vacuum signal connection points to ensure air tightness and resistance to interference.

6. During use, the device to be tested is placed on the heating platform, and the probe tip is manually adjusted to the pins of the test device using the three-axis movable probes.

External signal lines are connected to the testing instrument to measure electrical signals.

Basic Parameters:

1	High and low temperature type	Room temperature to 400 ℃ Room temperature to -190 ℃
2	Temperature display	7-inch human-machine interface
3	Temperature control accuracy	± 0.5 ℃
4	Thermocouple type	PT100 high-precision sensor
5	Temperature control type	standard PID temperature control+self-tuning
6	Temperature resolution	0.1 ℃
7	Temperature control output	DC linear power supply heating+liquid nitrogen flow rate controller
8	Auxiliary function	temperature data collection and export real-time temperature curve+historical temperature curve expandable vacuum Reading interface
9	Temperature controller size	approximately 32cm x 17cm x 38cm
10	Temperature controller weight	approximately 5.6KG
11	Program temperature control	30 segment program temperature control
12	Heating power	≤ 300W
13	Heating power supply	AC220V
14	Size	Approximately 230x230x125MM
15	Weight	Approximately 6kg
16	Material of the cavity	304 stainless steel
17	Processing method	Integrated CNC precision machining
18	Inner cavity size	approximately 137 x 57 x 21mm, volume 165ML
19	Heating table size	Φ 26x26mm
20	Sample stage heating method	resistance heating, liquid nitrogen cooling
21	Sample stage temperature sensor	PT100 type thermistor
22	Sample stage window distance	10mm (optional concave window to reduce the distance between the window and the sample)
23	Sample table heating rate	high temperature 20 ℃/min, maximum low temperature 7 ℃/min
24	Inner diameter of observation window	Φ 42mm
25	Observation window material	high transparency quartz glass
26	Signal output head	SMA female head wiring SMA to BNC 1.5 meters
27	Electrical performance	Insulation resistance ≥ 4000M Ω, dielectric withstand voltage ≤ 500V, leakage current ≤ -10 power amperes
28	Exhaust port	KF16 flange (other interface specifications can be converted)
29	Air inlet:	6mm card sleeve
30	Use positive pressure	≤ 0.05MPa
31	Use negative pressure	Mechanical pumps can achieve a vacuum of ≤ 10Pa, while molecular pumps can achieve a vacuum of ≤ 10-3 Pa
32	Probe specifications	Probe thickness of Φ 0.5mm, probe tip of 50 μ m (other specifications are optional)
33	Up and down movement distance	2.5mm
34	Forward and backward movement distance	± 10mm
35	Left and right rotation distance	120 °
36	Expandable accessories	Gas liquid injection port, 4-core electrical signal connector, 8-core electrical signal connector, SMA905 optical Fiber interface, expansion of 5KV high-voltage electrode, upgrade of 30 segment temperature control instrument

Basic configuration:

1	SUP-Z165M4RT micro probe station	1 Set
2	Touch screen temperature control box	1 Set
3	6mm PTFE tube	1 Set
4	Power cord	1 Set
5	6mm metal liners	2 Sets
6	Touch screen pen	1 Set
7	SMA banana plugs	4 Sets
8	power output line	1 Set
9	6mm water-cooled tube	6-meters
10	K-type upper cover wrench, spare screws, hexagonal socket	1 Set
11	Molecular pump, vacuum unit, mechanical pump (Optional)	1 Set