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Compact CVD furnace system with Length quartz tube Max 1100℃ for Nanowire Growth

Product Name: Compact CVD furnace system with Length quartz tube Max 1100℃ for Nanowire Growth

Product Model: OTF-1200X-4-NW

Product Description: The OTF-1200X-4-NW Nanowire Growth CVD Furnace is a compact CVD furnace specifically designed for the growth of various nanowires, with a maximum substrate size of 3″. A small heater is installed on the left side of the flange to preheat the incoming gases, liquids, or solids before they enter the CVD furnace for nanowire growth. Its slideable sample holder makes operation easier.

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Product Description

The OTF-1200X-4-NW Nanowire Growth CVD Furnace is a compact CVD Furnace specifically designed for the growth of various nanowires, with a maximum substrate size of 3″. A small heater is installed on the left side of the flange to preheat the incoming gases, liquids, or solids before they enter the CVD Furnace for nanowire growth. Its slideable sample holder makes operation easier.


Product Features

1. A compact CVD Furnace evolved from the OTF-1200X-4 single-zone furnace.  

2. The inner chamber surface is coated with imported high-temperature aluminum oxide, enhancing heating efficiency and extending the instrument's lifespan.  

3. The right flange with a sample holder is sliding, facilitating quick loading and unloading of samples.  

4. The small heater on the left side can preheat gases, liquids, solids, or mixtures entering the CVD Furnace, with a stainless steel heating chamber having an outer diameter of 30mm and a length of 150mm, and a maximum operating temperature of 600℃.  

5. The left flange (between the heater and the CVD furnace) is equipped with four 1/4″ ferrule-connected vent pipes, serving as seals and gas passages.  

6. The PID self-tuning digital controller allows for setting a 30-segment heating and cooling program.  

7. Optional software is available for temperature control via a computer.  

8. CE certified.


Product Parameters


Product NameCompact CVD furnace system with Length quartz tube Max 1100℃ for Nanowire Growth
Product ModelOTF-1200X-4-NW

Installation Conditions

This equipment is required to operate under the following conditions: temperature 25°C ± 15°C, humidity 55% Rh ± 10% Rh.

1. Water: Not required.

2. Electricity: AC 220V 50Hz, with proper grounding required.

3. Gas: The equipment chamber needs to be filled with gas; a gas cylinder must be provided.

4. Worktable: Dimensions of 1600mm × 600mm × 700mm, with a load capacity of over 150kg.

5. Ventilation System: Required.



Main 

Parameters


1. Rated Voltage: Single-phase AC 220V (110V opptional), 50Hz/60Hz.

2. Rated Power: 3KW (requires a 20A air switch).

3. Quartz Tube: Outer diameter Ø110mm, inner diameter Ø102mm, length 381mm.

4. Heating Zone: CVD furnace 400mm, heater 150mm.

5. Operating Temperature: 

   - CVD furnace Max 1100℃ (<2h), continuous operation 200℃-1000℃, Max heating and cooling rate 10℃/min.

   - Heater continuous operation 0-500℃, Max heating and cooling rate 10℃/min.

6. Temperature Control Accuracy: ±1℃.

7. Thermocouple: K-type.

8. Right Flange: Equipped with a 3″ quartz sample holder integrated with a quartz baffle and flange, featuring a KF25 vacuum quick connector and a water cooling connection (optional water chiller to prevent O-ring melting).

9. Left Flange: Contains two independent 1/4″ ports, allowing any gas to be introduced into the furnace separately; one 1/4″ port introduces preheated gas into the CVD furnace, while the other 1/4″ port introduces unheated gas, which merges with the heated gas through a T-structure inside the furnace.



Furnace and Preheater

Compact CVD furnace system with:

4.33" O.D x 4.05" I.D x 29.13" Length quartz tube  ( OD 110 xID 103 x L 740, mm )

1100ºC Max. working temperature with +/- 1oC accuracy

The water cooling flange on the right side is slidable for easy sample loading

The water cooling flange on the left side between the heater and furnace is used for pre-heated gas input and sealing

Four-channel gas inlet ( 1/8" Dia tube and tube fitting) are built-in on the left side flange

One small heater is attached to the left side flange of the furnace to preheat input gas, liquid,  or evaporate solid chemical, which will be then delivered to the CVD furnace:

Please click the picture left for more details:

1.2''O.D x 6''L SS tube as the heating chamber

Vacuum sealed 1" ID small quartz tube inside the heater  ( Pic 2)

400ºC Max. working temperature  ( 1000ºC heater is available upon request )

The flange on the left side is for gas sealing and input

Rated VoltageSingle Phase, 208-240 VAC, 50/60 Hz, AWG 8# Power cord is included (without plug)
Power consumption

Max. 3600 W (20 A breaker required

Heating Zone

CVD Furnace:  440 mm

Constant temperature zone: 100 mm 

Gas Heater:     150mm

Working Temperature

1. CVD Furnace:

Max heating temperature: 1100°C ( < 2 hour )

Continuous working temperature: 200~1000°C

Max heating & cooling rate: 20°C/min

2. Heater:

Continuous working temperature: RT~600°C

Max heating & cooling rate: 20°C/min

Dimensions

Standard:    62"L X 18"W X 23"H

Maximum:   80"L X 18"W X 32"H  (Lid open and right-side flange slide out)

CVD furnace system-dimensions.jpeg

Optional Accessories

1. Water Chiller

2. Temperature Control Software

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