Compact Movable Crucible RTP Tube Furnace Max 1200℃ for Annealing Rapid Thermal Processing

Main 

Parameters

1. Power Supply: 208 - 240 VAC, 50/60Hz; Max Power: 1.5KW.

2. Max Operating Temperature: 1200℃.

3. Continuous Operating Temperature: 1100℃.

4. Heating Rate: ≤ 20℃/min.

5. Heating Zone: 

   - Heating zone length: 200mm (single temperature zone).

   - Constant temperature zone length: 60mm (temperature deviation ±1°C when the furnace is heated to 1000°C).

6. Temperature Control System: 

   - 30-segment heating and cooling curve.

   - PID temperature adjustment with over-temperature and thermocouple disconnection protection.

   - Temperature control accuracy: ±1ºC.

7. Furnace Tube: One quartz tube (50mm O.D. x 44mm I.D. x 1000mm L); includes four aluminum oxide plugs.

8. Vacuum Flange: A pair of stainless steel sealing flanges, with an inlet of Φ6.35 ferrule connector and an outlet of KF25 interface (for connection to a vacuum pump).

9. Vacuum Level: 10⁻² torr (mechanical pump).

Furnace Structure

1. One high thermal conductivity Alumina flat sample holder (2" Lx1"W)  is fixed on K type sample, and the thermal couple with the sample holder can be moved inside a quartz tube driven by a magnet manually to find a desirable temperature position inside the tube for evaporation or deposition. 

2. One NIST-certified precision temperature monitor is connected to the thermal couple and sample holder via feedthrough on the vacuum flange.

3. One magnet is embedded inside the thermal block, and another magnet is placed outside the tube.  move the outside magnet can move the sample holder with the thermal couple inside the tube in or out

30 segment programmable temperature controller is installed in a furnace to set up Max. working temperature up to 1200oC at the center of the furnace

4. One small quartz crucible is included, which can be used to contain evaporation material or please wafer on top for deposition based on your application.

Furnace Power

110VAC or 208 - 240 VAC, 50/60Hz   (Please confirm voltage when placing order )

1.5 KW 

Max. Temperature

1100°C ( continuous)

<= 20 °C/min

1. Heating Zone Length:  8" (200mm), single zone. The following picture shows the temp. distribution across the heating zone, please click to enlarge.

2. Constant Temp. Zone:    2.3" (60mm)  (+/-1°C) @ 1000 °C 

3. You shall measure the furnace temperature profile for your own application before making film growth.

Temperature Accuracy

+/- 1°C

Heating 

Elements

Fe-Cr-Al Alloy doped by Mo

One year limited manufacturer warranty with lifetime support (Consumable parts such as processing tubes, o-rings and halogen lamps are not covered by the warranty, please order replacements at related products below).

CE Certified

NRTL certification(UL61010) or CSA certification is available at extra cost. 

Product 

specifications

With lid close: 1055mm (L) × 300mm(W) × 400mm(H) 

With lid open: 1055mm (L) × 300mm(W) × 560mm(H)