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Product Name: Compact Lab Evaporation Coating System
Product Model: SUP-GSL-1800X-ZF4
Product Description: The machine features a metal chamber with an extremely high vacuum level, reaching 5.0 × 10^-7 torr. The sample stage can heat the samples, with a temperature range from room temperature to 500°C, making it the preferred equipment for high-vacuum evaporation coating.
Product Description
The SUP-GSL-1800X-ZF4 evaporation coating system is a high-vacuum device, particularly suitable for the deposition of metal films that are sensitive to oxygen (such as Ti, Al, and Au) and small organic molecules. This system features four evaporation heating boats, each of which can operate independently. Above the heating boats, there is a rotating shield that covers the other three tungsten boats when one is in operation, preventing contamination between the deposited materials. With some configuration changes, it can also achieve the evaporation coating of organic materials, meeting the research requirements for optoelectronic devices and organic solar cells.
This system is an ideal experimental device with a high cost-performance ratio for coating applications. The SUP-GSL-1800X-ZF4 is equipped with five water-cooled electrodes at the bottom of the chamber, effectively protecting the electrodes from overheating and melting during operation, thus preventing damage.
Product Features
1. The vacuum control unit is fully integrated into a single control box.
2. It uses an independent evaporation current controller for convenient and quick operation.
3. The vacuum chamber is equipped with one KF40 backing valve (directly connected to the primary mechanical pump to enhance efficiency), one CF150 gate valve (directly connected to the molecular pump), one KF16 flange (for installing a resistive gauge), and six CF35 flanges (one for an ion gauge, one for a dual-electrode, and three spares).
4. The bottom of the chamber features five water-cooled electrodes that support four evaporation heating boats.
5. The sample stage is mounted at the top of the chamber.
6. A high-resolution film thickness gauge can be installed in the chamber, with a measurement resolution of 0.1 Å for aluminum.
7. A recirculating water chiller can be used.
Product Parameters
| Product Name | Compact Lab Evaporation Coating System |
| Product Model | SUP-GSL-1800X-ZF4 |
Installation Requirements | This equipment must be used under the following conditions: temperature 25°C ± 15°C and humidity 55% RH ± 10% RH. 1. Water: The equipment is equipped with a self-circulating cooling water system (use purified water or deionized water). 2. Electricity: AC 220V, 50Hz, with proper grounding required. 3. Work Surface: Floor-mounted, requiring a space of at least 2 m². 4. Ventilation: A ventilation system is necessary. |
Main Parameters |
1. Input: Single-phase AC 220V, 50Hz/60Hz, power < 2.16KW (excluding vacuum pump) 2. Evaporation Output: Voltage AC 0-8V continuously adjustable, maximum evaporation current 200A, maximum evaporation power < 1.6KW 3. Vacuum Chamber: Ø300mm (internal diameter) × 360mm (height), made of stainless steel, with electro-polished interior 4. Observation Window: Ø100mm, sealed with a specialized sealing ring 5. Vacuum Pump: High-speed turbo molecular pump, pumping speed 600L/s 6. Vacuum Level: 8.0 × 10^-4 Pa 7. Ultimate Vacuum: 8.0 × 10^-5 Pa 8. Leak Rate: 6.7 × 10^-8 Pa·L/S 9. Sample Stage: φ120mm 10. Distance between Evaporation Boat and Sample Stage: 140-200mm 11. Cooling Water Requirement: 15L/min 12. Sample Stage Heating Temperature: Room temperature to 500°C, with automatic temperature control and measurement. |
Product specifications | Dimensions: 900mm × 1100mm × 1800mm Weight: Approximately 230kg
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Tel: +86-18059149998
Email: sales@supsemi.com
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