Small Lab Evaporation Coating System - High-Performance Thin Film Deposition Equipment for Semiconductor Applications

Product Name: Small Lab Thin Film Evaporation Equipment

Product Model: SUP-GSL-1800X-ZF2

Product Description: The SUP-GSL-1800X-ZF2 evaporation coating system is primarily used in universities, research institutions, and corporate laboratories for vacuum coating process research, prototype fabrication, operation training, and production of small products.

During the evaporation process, the sample stage can rotate, ensuring that the evaporated thin film material is evenly distributed on the sample surface.

Product Description

The system is equipped with two evaporation units: one tungsten boat and one tungsten wire basket. Powdered thin film materials can be placed in the tungsten boat, while strip or block materials can be placed in the tungsten wire basket. The control panel features a 7-inch TFT display that shows the operation interface.

The TFT display offers advantages such as high responsiveness, brightness, and contrast, with touchscreen operation that provides a fully graphical interface, making it user-friendly and easy to understand. The SUP-GSL-1800X-ZF2 evaporation coating system is a high-vacuum evaporation device, with a vacuum level reaching 3.0 × 10^-4 torr.

Product Features

1. The system features a compact, desktop-integrated structure that combines the vacuum chamber, coating power supply, and control system, with a size comparable to an A3 printer.

2. It employs a resistive dual evaporation source structure, allowing for quick switching between evaporation sources. The evaporation unit is equipped with two sets of evaporation electrodes that can accommodate different evaporation sources, suitable for various coating materials.

3. The system includes a 0.1% precision evaporation power supply with constant current output, providing excellent protection for the evaporation boat.

4. An optional quartz crystal film thickness controller can be added to monitor and control the coating rate and film thickness during the coating process.

5. Coating data can be saved to a USB drive for user analysis and control (optional).

6. All functions are designed as standardized modules, allowing users to combine different modules based on their specific needs to achieve an optimal coating environment and facilitate easy maintenance.

7. The operation control uses a 7-inch TFT display to show the interface, with touchscreen operation that provides a fully graphical interface, making it user-friendly and easy to understand.

Product Parameters

Product Name

Small Lab Thin Film Evaporation Equipment

Product Model

SUP-GSL-1800X-ZF2

Installation

Requirements

This equipment must be used under the following conditions: temperature 25°C ± 15°C and humidity 55% RH ± 10% RH.

1. Water: The equipment is equipped with a self-circulating cooling water system (use purified water or deionized water).

2. Electricity: AC 220V, 50Hz, with proper grounding required.

3. Work Surface: Floor-mounted, requiring a space of at least 2 m².

4. Ventilation: A ventilation system is necessary.