Compact single-target Plasma Sputter Coater Sputtering Equipment for Thin Films

Product Name: Small Lab Plasma Sputter Coater

Product Model: SUP-1100X-SPC-16

Product Description: The SUP-1100X-SPC-16 single-target plasma sputtering system is a compact plasma sputtering device capable of sputtering various metals including gold, platinum, indium, and silver.

It can accommodate samples with a diameter of up to 50 mm and achieve coating thicknesses of up to 300 Å, making it particularly suitable for coating the surfaces of SEM samples.

Product Description

The SUP-1100X-SPC-16 single-target plasma sputtering system is equipped with a vacuum gauge for the sample sputtering chamber and a sputtering current meter to indicate and monitor the instrument's status. The specially designed rubber sealing ring at the edge of the bell jar ensures that there is no "chipping" of the glass bell jar, which could affect the vacuum level of the sample sputtering chamber even after prolonged use.

The ceramic-sealed high-pressure head is more durable than the commonly used rubber seals. The GSL-1100X-SPC-16 is compact and easy to operate, making it suitable for coating small samples in a laboratory setting.

Product Features

1. Equipped with a vacuum gauge and a sputtering current meter for real-time monitoring of the operating status.

2. By adjusting the sputtering current controller and the micro vacuum valve, the pressure in the vacuum chamber, ionization current, and the choice of ionization gas can be controlled to achieve excellent coating results.

3. The rubber sealing ring at the edge of the bell jar is specially designed to prevent "chipping" of the glass bell jar even after prolonged use.

4. The ceramic-sealed high-pressure electrode connector is more durable than the commonly used rubber seals.

5. Based on the gas ionization characteristics in the electric field, a large-capacity sputtering vacuum chamber and appropriately sized sputtering targets are employed to ensure a more uniform and pure sputtered coating.

6. The system has also been CE certified.

Product Parameters

Product Name	Small single-target Plasma Sputter Coater Sputtering Equipment for Thin Films
Product Model	SUP-1100X-SPC-16
Installation Requirements	This equipment is required to operate at a temperature of 25°C ± 15°C and a humidity of 55% RH ± 10% RH. 1. Water: Not required 2. Power: AC 220V (110V optional) 50Hz, must have good grounding 3. Gas: The equipment chamber must be filled with argon gas (purity of 99.99% or higher); an argon gas cylinder (with pressure regulator) must be provided by the user 4. Workbench: Dimensions 600 mm × 600 mm × 700 mm, with a load capacity of over 50 kg 5. Ventilation: Not required
Main Parameters	1. Power supply: 220V (110V optional) 2. Total power: <2000W (including vacuum pump) 3. Vacuum chamber: Ø160 mm × 120 mm 4. Sample stage: Ø50 mm, height adjustable, capable of coating up to 8 SEM samples simultaneously 5. Maximum uniform coating diameter: Ø45 mm
Product specifications	dimensions：400mm×300mm×400mm Weight：30kg