High-Performance Turbo Molecular Vacuum Pump Pumping System for Semiconductor Lab Research and Industrial Applications

The SUPSEMI standard composite molecular pump unit is a clean high vacuum acquisition device. This device is a vacuum acquisition system based on the principle of vacuum knowledge, using a combination of mechanical pumps and turbo molecular pumps. It has the characteristics of fast start-up time, high vacuum degree, and easy operation.

Widely used in surface analysis, accelerator technology, plasma technology, electric vacuum device manufacturing, and various fields of vacuum. The specific components of the equipment mainly include vacuum measurement system, vacuum chamber, valves and vacuum pipelines, electrical control system, etc

Note: Usually used together with Quartz Tube Vacuum Sealer.

-- Basic Parameters:

1. Control Method: Manual human-machine interface control  

2. Forepump: Bipolar 4-vane vacuum pump  

3. Forepump Pumping Speed: 2.2L/S (for customers requiring a clean vacuum environment, an oil-free dry pump can be optionally equipped)  

4. Forepump Ultimate Pressure: ≤5Pa  

5. Molecular Pump: FF-100/150, 51000 RPM  

6. Molecular Pumping Speed: 140L/S  

7. Molecular Pump Start-Up Time: ≤2min  

8. Ultimate Pressure Without Load: ≤1X10^-4Pa  

9. Vacuum Measurement Range: Cold cathode standard gauge from 1E+2 to 1E-5 Pa  

10. Pumping Interface: KF25  

11. Valve Type: KF25 manual gate valve  

12. System Power Supply: AC220V  

13. System Power: 1.5KW  

14. Ambient Temperature: 5~32℃  

15. Cooling Method: Forced air cooling  

16. Humidity: ≤80%  

17. Noise: ＜60 decibels  

18. Dimensions: 330X495X600mm  

19. Weight: 55KG

--Basic equipment and accessories
1. Molecular Pump Vacuum System x 1 unit  

2. Vacuum Gate Valve with KF25 interface  x 1 piece  

3. KF25 Clamps x 3 pieces  

4. KF25 1.5-meter Corrugated Tube x 1 piece  

5. Power Cable x 1 piece  

6. User Manual  x 1 copy

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