Element Symbol:Ta2O5
CAS:[N/A]
Model:Sup-Ta2O5
Purity:4N
Shape:Round,Square
Thickness:[N/A]
Dimension:[N/A]
(Note: Purity, shape, thickness, and dimensions can all be customized)
Description: Tantalum Pentoxide Target (Ta2O5) is a crucial high-k dielectric material widely used in the semiconductor, optoelectronic, and materials science fields. As a key material for thin film deposition, Ta₂O₅ exhibits excellent electrical and optical properties, making it suitable for capacitors, high-performance films, optical coatings, and the development of new semiconductor materials.
Ta2O5 Target Product Details
Tantalum Pentoxide Target (Ta2O5) is an important inorganic material widely used in the semiconductor, optoelectronic, and materials science fields. As a high-k dielectric material, Ta₂O₅ exhibits excellent electrical properties, making it suitable for the manufacture of various high-performance devices.
Note: Purity, shape, thickness, and dimensions can all be customized,Please feel free to contact us for more details.
Purity (%) | Shape | Manufacturing process | Max. Size |
99.99% | Plane target, Custom-shaped target | Vacuum Melting | Customized |
Ta2O5 Target Physical and Chemical Properties
- Appearance: Tantalum pentoxide target typically appears as a white or light yellow powder with high purity.
- Density: The density of Ta₂O₅ is approximately 8.2 g/cm³, indicating its relatively high mass.
- Melting Point: Its melting point is high, around 1870 °C, suitable for use under elevated temperature conditions.
- Solubility: Tantalum pentoxide is insoluble in water but soluble in strong acids and bases.
Applications of Ta2O5 Targets
The main applications of tantalum pentoxide targets include:
1. High-k Dielectric Films:
- Ta₂O₅ is widely used as a high-k dielectric material for manufacturing capacitors and other dielectric devices, enhancing device performance and storage capacity.
2. Thin Film Deposition:
- In techniques such as magnetron sputtering and chemical vapor deposition (CVD), tantalum pentoxide targets are used to produce high-quality films for integrated circuits and microelectronic devices.
3. Optical Applications:
- Ta₂O₅ exhibits good optical properties, suitable for manufacturing optical coatings and thin film optical components, enhancing the performance of optical devices.
4. New Material Development:
- Tantalum pentoxide also plays a crucial role in the development of new semiconductor materials, particularly in composite materials and multilayer structures.
Summary
Tantalum pentoxide targets demonstrate significant application potential in the semiconductor and optoelectronic fields, supporting the research and manufacture of high-performance electronic devices.
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