Sliding Tube Furnace for Rapidly Thermal Processing Max 1200C

Product Name: Sliding Tube Furnace for Rapidly Thermal Processing Max 1200C

Product Model: OTF-1200X-RTP-5S

Product Description: OTF-1200X-RTP-5S is a 5” sliding furnace with resistance heating and an electric sliding motor for rapid heating and cooling. It is capable of achieving a max. heating cooling rate 2°C/4°C per second and anneals wafer of max 4" diameter up to 1200°C.

Product Description

OTF-1200X-RTP-5S is a 5” sliding furnace with resistance heating and an electric sliding motor for rapid heating and cooling. It is capable of achieving a max. heating cooling rate 2°C/4°C per second and anneals wafer of max 4" diameter up to 1200°C.

Product Parameters

Product Name	Sliding Tube Furnace for Rapidly Thermal Processing Max 1200C
Model	OTF-1200X-RTP-5S
Furnace structure	- A double-layer steel casing with air cooling that ensures the furnace shell ≤60℃. - Separated temperature control unit for remote operation - 300 mm length heating zone with 100 mm constant temperature zone with +/- 3ºC - One set of sliding rails is installed which allows the furnace to move from one side to the other side. Automatically at variable speeds using the control knob is optional at extra cost. - Vacuum flanges and the digital vacuum gauge are installed for immediate use. - Quartz tube: 5" quartz tube (130mm O.D x 120mm I.D x 1100mmL) is included with airtight flanges - Annealing wafer up to 4" diameter max. with quartz boat.
Power	AC 208-240V Single Phase, 50/60 Hz 3 KW
Working Temperature	Maximum:1200℃< 0.5 hrs Continuous: 1100℃ or less
Sliding Control	- Dual sliding rails made of Cr plated steel - Sliding rail length: 1200 m - Sliding Range: 450mm - Optional: Automatic sliding is driven by DC motor. is controlled by the temperature controller. When the heating program is finished, the furnace will slide from right to left at the set speed. Air fans will blow the heated areas to achieve fast cooling.
Temperature Controller	- Two PID automatic controllers with 30 programmable segments for control of heating & cooling rate, and dwell time. - Built-in overheating & thermocouple broken protection. - +/- 1 ºC temperature accuracy. - RS485 Communications Port.
Heating and Cooling Rate	- Recommend Heating Rate for heating elements protection: ≤ 20°C/min - Rapid heating is achieved by sliding a preheated sample area - Max. heating rate is about 2ºC/S - Rapid cooling is achieved by sliding the heated furnace away from the sample area at room temperature. - Max. cooing rate is about 4ºC/S
Vacuum Flanges	Stainless steel vacuum flanges are installed on both ends of the tube. Left flange: One Φ6.35 inlet with a pressure gauge One stop valve. One port for armored thermocouple Right flange: One KF25 port One gas outlet with a stop valve. One port for armored thermocouple
Temp. Controllers
Dimensions	- 1300x 550 x 600 mm (furnace close) - 1300x 750 x 850 mm (furnace open) - 350x 250 x 410 mm (control box) Weight: 108 Kg
Warranty	One year limited with lifetime support. ( Consumable parts such as quartz tube and heating lamps are not covered by the warranty)