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Versatile Vacuum Probe Station 400℃ for Gas Sensing Applications Compact Cryogenic Testing Solution

Brand: SUPSEMI

Product Number: SUP-0904T-R

Product Description: SUP-0904T-R Vacuum Probe Station System heating type 400℃,high precision.

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SUP-0904T-R Vacuum Probe Station System Contains :

1. Vacuum Chamber;

2. Sample Stage;

3. Temperature Controller;

4. Probe;

5. Probe Positioning Stage;

6 Digital Microscope


The following are the technical specifications of each device.

Vacuum Chamber
ModelSUP-0904T-R High Temperature Type (Note: Different with SUP-0904T-RT  )
TypeHeating type 400 ℃ 
Material of the cavity304 stainless steel

Internal dimensions of the cavity

diameter 90x40mm. 
Window size on the cavityΦ 42mm (optional concave window Φ 22mm)
Chamber exhaust portKF16
Chamber air inletmetric 3mm 6mm air pipe joint, imperial 1/8mm 1/4mm air pipe joint optional
Chamber outletmetric 3mm 6mm air pipe joint, imperial 1/8mm 1/4mm air pipe joint optional
Positive pressure of the cavity≤ 0.05MPa;
Vacuum degree of chamberMechanical pump ≤ 5Pa (5 minutes);  Molecular pump ≤ 5E-3Pa (30 minutes)


Sample Stage
Sample table material304 stainless steel
Sample table size26X26mm
Distance from sample stage to window

30mm (optional concave window spacing of 15mm)

Sample stage temperature sensor:Class A PT100 platinum resistor
Sample stage temperature

from room temperature to 400 ℃ (optional high and low temperature sample stage high temperature 400 ℃ low temperature -190 ℃)

Sample stage temperature measurement error± 0.2 ℃
Sample stage temperature change rate

high temperature 10 ℃/min, low temperature 5 ℃/min, maximum value


Temperature Controller
Temperature display7-inch human-machine interface
Temperature control type

standard PID temperature control+self-tuning (optional 

30 segment programming temperature control)

Temperature resolution

0.1 ℃

Temperature control accuracy

± 0.5 ℃

Temperature signal input type

PT100 thermistor (optional K S B thermocouple)

Temperature control output

DC linear power supply heating (liquid nitrogen flow rate linear control liquid nitrogen refrigeration)

Auxiliary function

temperature data collection and export real-time temperature curve+historical temperature curve


Probe
Electrical signal connector

wiring adapter ,BNC connector, BNC triple coaxial connector ,

SMA connector ,Banana plug, wire length 1.2 meters

Electrical performance

Insulation resistance ≥ 4000M Ω, dielectric withstand voltage ≤ 200V, current noise ≤ 10pA

Number of probes

4 probes

Probe material

gold-plated tungsten needle

Probe tip

10 μ m


Probe Positioning Stage
X-axis travel

12mm ± 6mm

X-axis control accuracy

≤ 5 μ m

Y-axis travel

12mm ± 6mm

Y-axis control accuracy

≤ 5 μm

Z-axis travel

12mm ± 6mm

Z-axis control accuracy

≤ 5 μm



Digital Microscope
Microscope Category

Objective Magnification+Electron Magnification

Microscope magnification

37.5-256 times

Microscope field of view range

7.58mmX5.69mm-1.39mmX1.11mm

Microscope working distance

100-95mm

Camera pixel

20 megapixel CMOS sensor

Camera pixel size

1.335 μ m X1.335 μ m

Camera resolution

1080P 60fps camera 5120X3840

Camera signal output

HDMI output+USB output

LED Adjustable Light Source

Circular Light Source

Display screen

13 inch IPS screen

Display input interface

HDMI

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