Brand: SUPSEMI
Product Number: SUP-0904T-R
Product Description: SUP-0904T-R Vacuum Probe Station System heating type 400℃,high precision.
SUP-0904T-R Vacuum Probe Station System Contains :
1. Vacuum Chamber;
2. Sample Stage;
3. Temperature Controller;
4. Probe;
5. Probe Positioning Stage;
6 Digital Microscope
The following are the technical specifications of each device.
Vacuum Chamber | |
Model | SUP-0904T-R High Temperature Type (Note: Different with SUP-0904T-RT ) |
Type | Heating type 400 ℃ |
Material of the cavity | 304 stainless steel |
Internal dimensions of the cavity | diameter 90x40mm. |
Window size on the cavity | Φ 42mm (optional concave window Φ 22mm) |
Chamber exhaust port | KF16 |
Chamber air inlet | metric 3mm 6mm air pipe joint, imperial 1/8mm 1/4mm air pipe joint optional |
Chamber outlet | metric 3mm 6mm air pipe joint, imperial 1/8mm 1/4mm air pipe joint optional |
Positive pressure of the cavity | ≤ 0.05MPa; |
Vacuum degree of chamber | Mechanical pump ≤ 5Pa (5 minutes); Molecular pump ≤ 5E-3Pa (30 minutes) |
Sample Stage | |
Sample table material | 304 stainless steel |
Sample table size | 26X26mm |
Distance from sample stage to window | 30mm (optional concave window spacing of 15mm) |
Sample stage temperature sensor: | Class A PT100 platinum resistor |
Sample stage temperature | from room temperature to 400 ℃ (optional high and low temperature sample stage high temperature 400 ℃ low temperature -190 ℃) |
Sample stage temperature measurement error | ± 0.2 ℃ |
Sample stage temperature change rate | high temperature 10 ℃/min, low temperature 5 ℃/min, maximum value |
Temperature Controller | |
Temperature display | 7-inch human-machine interface |
Temperature control type | standard PID temperature control+self-tuning (optional 30 segment programming temperature control) |
Temperature resolution | 0.1 ℃ |
Temperature control accuracy | ± 0.5 ℃ |
Temperature signal input type | PT100 thermistor (optional K S B thermocouple) |
Temperature control output | DC linear power supply heating (liquid nitrogen flow rate linear control liquid nitrogen refrigeration) |
Auxiliary function | temperature data collection and export real-time temperature curve+historical temperature curve |
Probe | |
Electrical signal connector | wiring adapter ,BNC connector, BNC triple coaxial connector , SMA connector ,Banana plug, wire length 1.2 meters |
Electrical performance | Insulation resistance ≥ 4000M Ω, dielectric withstand voltage ≤ 200V, current noise ≤ 10pA |
Number of probes | 4 probes |
Probe material | gold-plated tungsten needle |
Probe tip | 10 μ m |
Probe Positioning Stage | |
X-axis travel | 12mm ± 6mm |
X-axis control accuracy | ≤ 5 μ m |
Y-axis travel | 12mm ± 6mm |
Y-axis control accuracy | ≤ 5 μm |
Z-axis travel | 12mm ± 6mm |
Z-axis control accuracy | ≤ 5 μm |
Digital Microscope | |
Microscope Category | Objective Magnification+Electron Magnification |
Microscope magnification | 37.5-256 times |
Microscope field of view range | 7.58mmX5.69mm-1.39mmX1.11mm |
Microscope working distance | 100-95mm |
Camera pixel | 20 megapixel CMOS sensor |
Camera pixel size | 1.335 μ m X1.335 μ m |
Camera resolution | 1080P 60fps camera 5120X3840 |
Camera signal output | HDMI output+USB output |
LED Adjustable Light Source | Circular Light Source |
Display screen | 13 inch IPS screen |
Display input interface | HDMI |
Office Photo
Exhibition
Contact: Bruce Liu
WhatsApp: +86-18059149998
Tel: +86-18059149998
Email: sales@supsemi.com
Add: Room 1402, Building 1, No. 89 Xibeilu, Xishancun, Xibei Street, Xinluo District, Longyan City, Fujian Province
We chat