Three Zone Quartz Tube Furnace (80mm Dia, 1200C Max) for CVD or Diffusion

Product Name: Three Zone Quartz Tube Furnace (80mm Dia, 1200C Max) for CVD or Diffusion

Product Model: OTF-1200X-III-80-F3LV

Product Description: OTF-1200X-III-80-F3LV is a splittable three zones Tube furnace with a mechanical vacuum pump & digital vacuum gauge and three channels gas flowing system, which can achieve vacuum up to 10-2 torr and mix 1-3 types of gases for CVD or diffusion.

Product Description

OTF-1200X-III-80-F3LV is a splittable three zones Tube furnace with a mechanical vacuum pump & digital vacuum gauge and three channels gas flowing system, which can achieve vacuum up to 10-2 torr and mix 1-3 types of gases for CVD or diffusion. This furnace system also includes an anti-corrosive Pirani Capacitance Diaphragm Gauge to enable vacuum measurements with aggressive gases.

Product Parameters

Furnace Construction	• Double-layer steel casing with air cooling • High-purity alumina fiber insulation for max. energy saving • Splittable cover for easy tube replacement
Power Consumption	5 KW
Input Voltage	AC 208-240V Single Phase, 50 or 60 Hz
Maximum Temperature	1200°C
Continuous Temperature	1100°C
Max. Heating Rate	≤ 20°C /min
Heating Zone Length	Three zones: (880mm, 35" in total) • Zone 1: 220mm (8.6" ) • Zone 2: 440mm (17.3") • Zone 3: 220 mm (8.6")
Constant Temperature Zone	• If three zones are set at the same temperature, the constant temperature zone is 25" (625 mm) long with a temperature discrepancy of +/- 1°C. • If using only one zone (center zone), the constant temperature zone is 4.3" (110 mm) long with a temperature discrepancy of +/- 1°C.
Temperature Controller	• Three precision temperature controllers to control three zones separately. • PID automatic control with 30 programmable segments for precise control of heating rate, cooling rate, and dwell time. • Built-in overheating & broken thermocouple protection. • Over temperature protection and alarm allows for operation without attendant(s). • +/- 1 ºC temperature accuracy. • RS485 Communications Port.
Temperature Accuracy	+/-1°C
Heating Elements	Fe-Cr-Al Alloy doped by Mo
Quartz Tube& Sealing Flanges	• 80 mm O.D x 72 mm ID. x 1400 mm fused quartz tube included. • Vacuum flanges with valves and pressure gauges are included. • The thermal block must be placed inside the tube as in the drawing below.
Vacuum Sensor & Display	• Corrosion-proof Capacitance Diaphragm Gauge with ceramic coated sensor head specially designed for vacuum measurements with the presence of corrosive gases. • Gauge is installed on the vacuum flange (right side) of the tube furnace and provides a wide measure range (10^-5 ~ 1000 torr).
Sliding Flange with Sample Holder	Slide for transferring sample (manually operated) is available as an option at $1900 extra cost (please refer to pictures below).
Dimensions	Dimensions: • Furnace: 1100 X 450 x 670 mm • Bottom Mobile case: 600x600x597 mm Weight: 850 Lbs
Warranty	One-year limited manufacturer's warranty (Consumable parts such as processing tubes, O-rings and heating elements are not covered by the warranty, please order replacements at related products below).