Differences Between Rapid Thermal Annealing Furnace (RTP) and Tube Furnace

Rapid thermal annealing furnaces(RTP Tube Furnace) and tube furnaces differ significantly in terms of heating methods, heating efficiency, temperature ranges, and structures. They are two common types of heat treatment equipment.

1. Heating Method

Rapid Thermal Annealing Furnace: This type uses electric heating elements, such as resistance heaters, halogen lamps, or induction coils. This heating method offers advantages like fast heating speed, precise temperature control, and uniform temperature distribution.

For example, the Shengding rapid thermal annealing furnace uses infrared halogen lamps for heating and air cooling for rapid temperature control, ensuring good reproducibility and temperature uniformity. Its processing range covers 200 to 1250 degrees Celsius, utilizing a specialized RTP algorithm.

Tube Furnace: Typically uses convection heating, where the air inside the furnace is heated and then circulates to heat the samples within the tube. Convection heating has disadvantages, including slower heating speed, uneven temperature distribution, and lower heating efficiency.

2. Heating Efficiency

Rapid Thermal Annealing Furnace: It has high heating efficiency, allowing for precise temperature control and achieving uniform temperature quickly, which results in effective annealing. The heating and cooling speeds are generally much faster than those of traditional tube furnaces, making it well-suited for the stringent temperature and time precision requirements of semiconductor devices.

Tube Furnace: Its heating efficiency is relatively lower, with slower heating speeds, making it suitable for applications where high heating speed is not critical.

3. Temperature Range

Rapid Thermal Annealing Furnace: The temperature processing range can reach from 200 to 1250 degrees Celsius, applicable in various industries for annealing treatments, such as the semiconductor, renewable energy, and metal industries.

Tube Furnace: Typically has a broader temperature range, suitable for various heat treatment processes, including annealing, sintering, and drying, from low to high temperatures. Due to its wide temperature range, tube furnaces are used in various industrial fields, such as metal processing, ceramic sintering, and powder metallurgy.

4. Structure

Rapid Thermal Annealing Furnace: Usually features a flat or rectangular design, with one or more heating elements located either at the top or bottom. These heating elements transfer heat to the sample surface via radiation, allowing for rapid heating and cooling. In a rapid thermal annealing furnace, samples are typically placed directly on a tray or rack at the bottom of the furnace.

Tube Furnace: A closed furnace body, usually cylindrical or rectangular, with heating elements inside. Samples are placed in a tube within the furnace, where they are heated. The structure and appearance of tube furnaces are relatively complex, requiring some expertise for operation and maintenance.

Safety Considerations:

Rapid thermal annealing furnaces generally offer higher safety. Their electric heating elements provide high temperature control precision, effectively preventing overheating or localized overheating. Additionally, rapid thermal annealing furnaces have good sealing performance, reducing gas exchange between the furnace interior and the outside environment, thereby minimizing risks to operators.

In contrast, tube furnaces may have lower safety due to gas heating, which poses risks of gas leaks and explosions. Their sealing performance is relatively poor, making them prone to gas leakage, which can endanger the health of operators.

When choosing heat treatment equipment, it's essential to select the suitable equipment based on specific application needs. Although rapid thermal annealing furnaces and tube furnaces exhibit significant differences in performance and applicable fields, both are indispensable in materials processing and semiconductor manufacturing.