1000C Max Slide-able RTP (4'' OD) Tube Furnace with Rapidly IR Heating & Cooling

OTF-1200X-RTP-4-SL

Furnace Structure 

1. A double-layer steel casing with air cooling keeps the furnace heating longer time up to 1000ºC.

2. IR lamp heating with fast heating rate up to ~50ºC/S

3. One set of sliding rails is installed which allows the furnace to move from one side to the other side automatically at variable speeds using the control knob.

4. Vacuum flanges and the digital vacuum gauge are installed for immediate use.

5. Annealing wafer up to 3 " diameter max .

Power of furnace

AC 208-240V Single Phase, 50/60 Hz

9KW  

Max. Temperature

1000°C (< 1 hours)      

900°C       continuous

Note: RTP furnaces should not be heated for long durations due to thin refractories.

Process Tube Size

High purity fused quartz tube

4" quartz tube (100 mm O.D x 94 mm I.D x 1400mmL)

Heating & Cooling Rates

Max. Heating rate: 50  ºC/s

Max. Cooling rate:   8 ºC/s    ( 1000 - 600ºC， via sliding furnace away from sample )

Sliding Rails / Table

Dual sliding rails made of Cr plated steel

Sliding rail length: 1200 mm

Driven by DC motor

1. Sliding Range: 340mm

2. Sliding Speed: 0-70 mm/s; adjustable

3. Automatic sliding is controlled by the temperature controller.  When the heating program is finished, the furnace will slide from right to left at the set speed. Air fans will blow the heated areas to achieve fast cooling.

Heating Elements

8 pcs 1Kw Halogen light tube,  ( Dia. =10mm,  L=300mm, Heated Length =200mm)

Standard working life: 2000 hrs.  ( depends on heating rate )

The Halogen light tube is consumable.  Please contact us order a spare one

Two K type, 1/4" Dia x 24" length

One is for controlling furnace temperature

One is inserted inside the furnace in the sample area to monitor heating and cooling

Stainless steel vacuum flanges are installed on both ends of the tube.

Right flange:

Hinge-type flange for easy sample loading

1/4"diameter  feedthrough for inserting  K-type thermal couple

Needle valve with barb gas fitting is built-in.

Left flange:

The digital vacuum gauge is included

KF25 right angle valve is installed for connecting to a vacuum pump

A needle valve for vacuum release is included

Dimensions: 

460 x 330 x 520  mm ( furnace only)

1800 x 450 x 680 mm ( furnace + sliding)

One-year limited manufacturer's warranty (Consumable parts such as processing tubes, O-rings and heating elements are not covered by the warranty, please order replacements at related products below).