Splittable RTP Tube Furnace Max 1200C with Sample Sliding Function Under High Vacuum

Product Name: Splittable RTP Tube Furnace Max 1200C with Sample Sliding Function Under High Vacuum

Product Model: OTF-1200X-DVD-M

Product Description: OTF-1200X-DVD-M is a splittable tubular furnace with a crucible sliding function (manually pushing ) in a high vacuum or air-tight atmosphere, with a maximum temperature of 1200 °C. The vacuum-sealed manual push crucible is actualized by a magnetic coupling vacuum push system. This equipment can carry out titanium sheet annealing treatment, rapid heat treatment, HPCVD, rapid thermal evaporation (RTE), and direct vapor deposition (DVD) in various atmospheres.

Product Description

OTF-1200X-DVD-M is a splittable tubular furnace with a crucible sliding function (manually pushing ) in a high vacuum or air-tight atmosphere, with a maximum temperature of 1200 °C. The vacuum-sealed manual push crucible is actualized by a magnetic coupling vacuum push system.

This equipment can carry out titanium sheet annealing treatment, rapid heat treatment, HPCVD, rapid thermal evaporation (RTE), and direct vapor deposition (DVD) in various atmospheres.

Product Parameters

Product Name	Splittable RTP Tube Furnace Max 1200C with Sample Sliding Function Under High Vacuum
Model	OTF-1200X-DVD-M
Furnace Structure	1. The mobility of crucible in vacuum/atmosphere through magnetic coupling drive. 2. Real-time temperature measurement by a thermocouple at the bottom of the crucible. 3. The flange of the left end is connected with a clamp to reach samples conveniently. 4. High vacuum sealed up to 10-5 torr
Power of furnace	AC single-phase 220V 50/60HZ 3.5 kW
Working Temperature	Max. 1200°C (<30 min) Continuous: 1100°C ( ) Max. Heating Rate: <= 10 °C/min Temperature Accuracy: +/- 1°C
Heating Zone	400mm Length You shall measure the furnace temperature profile for your own application before making film growth.
Tube Size	Quartz tube: 100 O.D x 95 I.D x 1000 L (mm)
Temperature Controller	1. Two temperature controllers are included. One is for controlling furnace temperature, and a2. nother is for displaying moveable crucible temperature 3. PID automatic control via solid-state relay with 30 steps programmable 4. Built-in Over Temperature and Thermocouple Failure Protection 5. Optional: The furnace may be operated by PC by installing a control module. Please order an MTS02-B control module at extra cost.
Vacuum Flanges and Vacuum Actuator	Left side ： 4" flange with 1/4'' Bard fittings, 1/4'' tube feedthrough port (for 1/4" O.D thermocouple insert), and a KF40 vacuum port to connect a vacuum pump Right side: 4"quick clamping flange with magnetically coupled vacuum actuator The vacuum actuator rod will hold a quartz crucible with quartz thermal buffer, which can move in or out a sample in the crucible manually to achieve heating or cooling rapidly K type thermal couple is located bottom of the crucible to control the temperature Optional: Electric actuator is available upon request at the extra cost
Vacuum Pump	A turbopump is included to connect the left side flange 10-6 torr max ( cold state )
Dimensions	Dimensions: 2100X410X690mm Weight: 128kg
Warranty	One-year limited manufacturer's warranty (Consumable parts such as processing tubes, O-rings and heating elements are not covered by the warranty, please order replacements at related products below).