Max 1200C RTP Tube Furnace (3

OTF-1200X-80-DVD

Furnace Structure 

1. One high thermal conductivity Alumina flat sample holder (2" Lx1"W)  is fixed on K type sample, and the thermal couple with the sample holder can be moved inside a quartz tube driven by a magnet manually to find a desirable temperature position inside the tube for evaporation or deposition. 

2. One NIST-certified precision temperature monitor is connected to the thermal couple and sample holder via feedthrough on the vacuum flange.

3. One magnet is embedded inside the thermal block, and another magnet is placed outside the tube.  move the outside magnet can move the sample holder with the thermal couple inside the tube in or out

4. 30 segment programmable temperature controller is installed in a furnace to set up Max. working temperature up to 1200oC at the center of the furnace

5. One small quartz crucible is included, which can be used to contain evaporation material or please wafer on top for deposition based on your application. 

Power of furnace

110VAC or 208 - 240 VAC, 50/60Hz   (Please confirm voltage when placing order )

1.5 KW

Max. Temperature

1200°C (<1 hour)

Continuous Temperature

1100°C ( continuous)

Max. Heating Rate

<= 20 °C/min

Heating Zone

1. Heating Zone Length:  8" (200mm), single zone. The following picture shows the temp.

2. Constant Temp. Zone:    2.3" (60mm)  (+/-1°C) @ 1000 °C 

3You shall measure the furnace temperature profile for your own application before making film growth.

Temperature Controller

1. PID automatic control via solid-state relay with 30 steps programmable

2. Built-in Over Temperature and Thermocouple Failure Protection

Optional:  The furnace may be operated by PC with installing a control module. Please order a MTS02-B control module at extra cost.  

Temperature Accuracy 

+/- 1°C        

1. 2 inches quartz tube (50mm O.D x 44mm I.D x 1000mm L) 

2. Two fibrous ceramic tube blocks are included for blocking heat radiation from the tube chamber. (Ceramic blocks must be fully inserted into the furnace chamber before heating)

3. One small quartz boat is included for placing samples or evaporation materials.

Dimensions: 2400X450X700mm

One-year limited manufacturer's warranty (Consumable parts such as processing tubes, O-rings and heating elements are not covered by the warranty, please order replacements at related products below).