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Compact IR Lamp Heating Sliding RTP Tube Furnace (5'' OD) Max 1200°C for Laboratory

Product Name: Compact IR Lamp Heating Sliding RTP Tube Furnace (5'' OD) Max 1200°C for Laboratory

Product Model: OTF-1200X-5-SL

Product Description: OTF-1200X-5-SL is a 5” sliding furnace with resistance heating and an electric sliding motor for rapid heating and cooling. It is capable of achieving a max. heating cooling rate > 10°C/s and anneals wafer of max 4" diameter up to 1200C.

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Product Description

OTF-1200X-5-SL  is a 5” sliding furnace with resistance heating and an electric sliding motor for rapid heating and cooling. It is capable of achieving a max. heating cooling rate > 10°C/s and anneals wafer of max 4" diameter up to 1200°C.

 

Product Parameters

Product Name

Compact IR Lamp Heating Sliding RTP Tube Furnace (5'' OD) Max 1200°C for Laboratory

Model

OTF-1200X-5-SL

Furnace Structure 

1. A double-layer steel casing with air cooling that ensures the furnace can be used at 1200oC continuously

2. Separated temperature control unit for remote operation

3. 300 mm length heating zone with 100 mm constant temperature zone with +/- 2ºC

4. One set of sliding rails is installed which allows the furnace to move from one side to the other side automatically at variable speeds using the control knob.

5. Vacuum flanges and the digital vacuum gauge are installed for immediate use.

6. Quartz tube: 5" quartz tube (130mm O.D x 120mm I.D x 1400mmL) is included with airtight flanges

7. Annealing wafer up to 4" diameter max. with quartz boat. 

IR Lamp Heating Sliding <a href=https://www.supsemi.com/en/RTP-Tube-Furnace.html target='_blank'>RTP Tube Furnace</a> Structure.jpg

IR Lamp Heating Sliding <a href=https://www.supsemi.com/en/RTP-Tube-Furnace.html target='_blank'>RTP Tube Furnace</a> Structure.jpg

Power of furnace

AC 208-240V Single Phase, 50/60 Hz

3.5 KW

Working Temperature

1200℃ Max.        < 1 hrs

1100 or less: continuous


Sliding Control

1. Dual sliding rails made of Cr plated steel

2. Sliding rail length: 1200 mm

3. Sliding driven by DC motor

4. Automatic sliding is controlled by the temperature controller.  When the heating program is finished, the furnace will slide from right to left at the set speed. Air fans will blow the heated areas to achieve fast cooling.

    - Sliding Range: 340mm

    - Sliding Speed: 0-70 mm/s; adjustable

IR Lamp Heating Sliding RTP Tube Furnace Sliding Control.jpg

Heating and Cooling Rate

Rapid heating is achieved by sliding a preheated to sample area

    - Max. heating rate is about 10ºC/S

Rapid cooling is achieved by sliding heated furnace away from sample area and air fan cooling

    - Max. cooing rate is about 10ºC/S

One thermal couple is inserted to the sample area and records the curves of heating and cooling via software

Temperature Controller

- Two PID automatic controllers with 30 programmable segments for control of heating  & cooling rate, and dwell time.

Built-in overheating & thermocouple broken protection.

Two thermal couples are included: one for furnace temperature control, and one for record heating and cooling rate

-  +/- 1 ºC temperature accuracy.

-  RS485 Communications Port.


Vacuum Flanges

Stainless steel vacuum flanges are installed on both ends of the tube.

Right flange:

Hinge-type flange for easy sample loading

1/4"diameter  feedthrough for inserting  K-type thermal couple

Needle valve with barb gas fitting is built-in

Vacuum Flanges.jpg

Left flange:

The digital vacuum gauge is included

KF25 right angle valve is installed for connecting to a vacuum pump

A needle valve for vacuum release is included

Vacuum Flanges.jpg

 

Vacuum Level

Limited by a vacuum pump

10^-2 torr can be achieved by the mechanical pump

10^-4 torr can be reached by molecular pump

The vacuum pump is not included, please order separately


Dimensions

Dimensions: 

460 x 330 x 520  mm ( furnace only)

1800 x 450 x 680 mm ( furnace + sliding) 

Weight: 80kg

IR Lamp Heating Sliding RTP Tube Furnace Dimension.jpg

Warranty

One-year limited manufacturer's warranty (Consumable parts such as processing tubes, O-rings and heating elements are not covered by the warranty, please order replacements at related products below).

IR Lamp Heating Sliding RTP Tube Furnace.jpg

IR Lamp Heating Sliding RTP Tube Furnace.jpg

IR Lamp Heating Sliding RTP Tube Furnace.jpg

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