Compact 1000℃ RTP Furnace for Annealing Semiconductor and Solar Cell Wafers

Product Name: Compact 1000℃ RTP Furnace for Annealing Semiconductor and Solar Cell Wafers

Product Model: OTF-1200X-4-RTP

Product Description: The Compact 1000℃ RTP Furnace OTF-1200X-4-RTP is a sleek rapid thermal processing tube furnace equipped with a 4" quartz tube and a vacuum flange, specifically designed for the annealing of semiconductor or solar cell wafers (max 3").

Product Description

The Compact 1000℃ RTP Tube Furnace OTF-1200X-4-RTP is a sleek rapid thermal processing tube furnace equipped with a 4" quartz tube and a vacuum flange, specifically designed for the annealing of semiconductor or solar cell wafers (max 3"). This machine utilizes a 10 kW infrared lamp for heating, with a maximum heating rate of 50°C/s and features 30 segments of temperature control with an accuracy of ±1°C. Additionally, real-time control and temperature curve display can be achieved on a computer via an RS485 port and control software.

Product Features

1. The inner chamber surface is coated with imported high-temperature aluminum oxide, enhancing heating efficiency and extending its lifespan.

2. The quartz sample holder is fixed on a sliding flange, making sample loading easier.

3. A 76mm (3") AlN substrate is placed on the sample holder to support the samples that need annealing. AlN has high thermal conductivity, providing excellent temperature uniformity (±5°C) in the sample placement area.

4. An embedded thermocouple ensures accurate temperature measurement.

5. PID automatic temperature control is employed with a 30-segment program, featuring overheat and disconnection protection, as well as auto-tuning functionality.

6. CE certified. All electrical components (>24V) are UL/MET/CAS certified. If the user bears the certification costs, our company guarantees that each unit will pass German TÜV certification and CAS certification.

7. A SiC-coated graphite crucible can be added to convert the furnace into an RTE (Rapid Thermal Evaporation) furnace.

Product Parameters

Product Name	Compact RTP Furnace with 4" ID Quartz Tube 1000℃ for Annealing Semiconductor Wafers
Product Model	OTF-1200X-4-RTP
Installation Requirements	This equipment is required to operate under the following conditions: temperature 25°C ± 15°C, humidity 55% Rh ± 10% Rh. 1. Water: The equipment must be equipped with a self-circulating cooling water machine (fill with purified water or deionized water). 2. Electricity: AC 220V 50Hz (35A air switch), with a good grounding required. 3. Gas: The equipment chamber needs to be filled with argon gas (purity of 99.99% or higher); an argon gas cylinder must be provided (with a Ø6mm double ferrule connector). 4. Worktable: Dimensions of 1500mm × 600mm × 700mm, with a load capacity of over 200kg. 5. Ventilation System: Required.
Main Parameters	1. Power Supply: 208V-240V AC, single-phase 50Hz/60Hz, max power 9KW (>60A fuse). 2. Furnace Structure: Double-layer mullite steel construction (without water cooling or air cooling). 3. Quartz Tube: Outer diameter Ø110mm, inner diameter Ø103mm, length 380mm. 4. Sample Holder: 76mm. 5. Heating Elements: 8 infrared lamp tubes, filament length 200mm, filament diameter Ø10mm, lamp length 300mm. 6. Constant Temperature Zone: 102mm × 305mm, uniformity ±5°C. 7. Thermocouple: K-type thermocouple. 8. Temperature: Max temperature 1100°C, rated temperature 1000°C (Warning: holding time between 1000°C and 1100°C must not exceed 600s; otherwise, the O-ring may melt). 9. Temperature Control Accuracy: ±1°C. 10. Fastest Heating Rate: 50°C/s from RT to 800°C, 10°C/s from 800°C to 1000°C. 11. Fastest Cooling Rate: 60°C/min (at 200 mtorr), 117°C/min (at atmospheric pressure). 12. Vacuum Level: 50 mtorr (mechanical pump), 10⁻⁴ torr (molecular pump). 13. Vacuum Flange: Equipped with KF-D25 high vacuum stainless steel flange, with two high-temperature O-ring seals. 14. Flow Meter: 16ml/min - 160ml/min. 15. Vacuum Gauge: Digital vacuum gauge, measuring range 10 mtorr - 800 torr (Note: This gauge is calibrated in nitrogen; actual pressure displayed is only valid under nitrogen and air. For any other gas, refer to the relative gas comparison chart in the manual, or severe consequences may occur). 16. Water Cooling: If cooling water is required, ensure a flow rate of 3L/min, water temperature of 20°C, and water pressure of 25 PSI (it is recommended to use a circulating water chiller as the cooling system).
Furnace Structure	1. Double-layer steel casing with air cooling keeps furnace surface temperature lower than 60°C. 2. High purity fibrous alumina insulation for maximum energy saving. 3. Split cover with Interlock protection, cut the power if lid open during furnace heating process.
Heating Elements	8 pcs 1Kw Halogen light tube, ( Dia. =10mm, L=300mm, Heated Length =200mm) Standard working life: 2000 hrs. ( depends on heating rate ) The Halogen light tube is consumable. Please click picture left to order a spare one
Heating Zone	12" length with 4" constant temperature zone within +/-5ºC uniformity
Working Temperature	1100ºC Max. for < 10 minutes 1000ºC Max. for < 20 minutes (Note: if running longer time, furnace case will > 100°C, must use fan to cool the furnace case from outside) 800ºC Max. for < 120 minutes 600ºC Max. for Continuous
Max. Heating Rate	50ºC/sec Recommended 5 ºC/s, up to 1000ºC
Cooling Rate	Max. Cooling: 60ºC/min (Under vacuum: 200 m-torr), 117ºC/min (under atmospheric pressure) Lowest Cooling: 10 ºC / minute
Vacuum Flanges	KF-D25 High Vacuum Flange is made of stainless steel with double hi-temp. silicone O-rings, needle valves, and a water-cooling jacket. It only requires water cooling in long-running times at temperatures > 600oC. Circulating water rate: 0.5 m3 /hr. The slide-out flange provides an easier way of loading, unloading the samples and other specific processes needed. Insert-able thermal-couple for accurate measurement.
Warranty	One year limited manufacturer warranty with lifetime support (Consumable parts such as processing tubes, o-rings and halogen lamps are not covered by the warranty, please order replacements at related products below).
Compliance	CE Certified NRTL certification(UL61010) or CSA certification is available at extra cost.
Product specifications	Flange closed: 1350mm(L) x 330mm(W) x 590mm(H) Flange opened: 1350mm(L) x 520mm(W) x 740mm(H)