Heating 200℃ Spin Coating Machine for Acid Alkali-Resistant Film Deposition with Dual Vacuum Chuck

Heating 200℃ Spin Coating Machine for Acid Alkali-Resistant Film Deposition with Dual Vacuum Chuck

Product Name: 200℃ Heating Dual Vacuum Chuck Spin Coater for Acid Alkali-Resistant Film Deposition

Product Model: VTC-100PA-II

Product Description: VTC-100PA-II Automatic Spin Coater for perovskite film deposition. Multilayer coating with precise dispensing and drying. Vacuum suction for secure substrate. Ideal for semiconductor, crystal & optical film research.

Product Description

The VTC-100PA-II Vacuum Spin Coater is suitable for surface coating processes in applications such as semiconductors, crystals, optical discs, and photomasks. This machine can prepare films using strong acid and alkaline coating solutions. It comes standard with two vacuum chucks of different sizes, allowing users to select the appropriate chuck based on the sample size.

During operation, the VTC-100PA-II uses a vacuum suction method to secure the sample on the sample holder. The device can store 12 sets of programs, each containing 6 operational stages. Different rotational speeds are set for each stage, allowing the device to gradually increase to the maximum speed, which promotes even film formation on the sample surface while minimizing material waste.

The VTC-100PA-II Vacuum Spin Coater is user-friendly, easy to clean, and compact, making it ideal for laboratories in universities and research institutions for the film generation process.

Product Features

1. The sample is fixed using a vacuum suction method, making operation simple and convenient.

2. The vacuum can reach -0.08 MPa.

3. A positioning tool allows for easy placement of samples in the center, reducing vibrations or chipping caused by eccentricity.

4. Different chucks can be used based on the sample specifications, and they are easy to replace.

5. The motor is a 24V DC brushless motor, offering high reliability, strong adaptability, easy maintenance, low noise, minimal vibration, and smooth operation. It starts quickly and stabilizes during acceleration, ensuring consistent and uniform coating thickness.

6. An oil-free dual-cylinder vacuum pump is utilized, which is compact, simple in structure, easy to operate, convenient to maintain, and environmentally friendly.

7. The chamber is made of polypropylene material, providing a longer lifespan and enhanced chemical corrosion resistance, as well as excellent stress crack resistance. The body is constructed from cast aluminum, making it sturdy, durable, and lightweight.

8. Coating can be performed in an inert gas atmosphere (such as Ar or N2).

9. The system features a fully English operating interface.

10. It includes a cover protection function that causes the machine to immediately decelerate and stop when the upper cover is opened during or after the coating process.

11. The control interface employs an LCD display combined with a single-board control system, providing a more intuitive and reliable numerical display.

Product Parameters

Product Name

Max 200℃ Dual Vacuum Chuck Spin Coater for Acid Alkali-Resistant Film Deposition

Product Model

VTC-100PA-II

Installation

Requirements

1. Temperature and Humidity: 10-85% RH (at 25°C, without condensation); Temperature: 0-45°C.

2. Environmental Conditions: There should be no strong vibration sources or corrosive gases around the equipment.

3. Water: The equipment is equipped with a drainage outlet.

4. Electricity: Single phase: AC 220V, 50Hz, national standard three-prong socket, 10A; must have good grounding.

5. Gas: Vacuum negative pressure (vacuum pump); the pumping flow rate should be no less than 70 L/min (the equipment can connect to protective inert gases, such as Ar or N2).

6. Work Table: Recommended dimensions are 800 x 600 x 700 mm with a load capacity of over 50 kg (a solid cement table is preferred).

7. Ventilation System: No special requirements.

Main

Parameters

1. Power Supply Interface: AC 220V, 50Hz, 10A.

2. Total Power: ≤150W (excluding external vacuum pump).

3. Coating Chamber Material: Polypropylene.

4. Sample Holder (Chucks): One polypropylene chuck each of Φ19mm and Φ60mm.

5. Operating Mode: Can store 12 sets of programs; each program contains 6 operational stages.

6. Coating Speed: Effective range of 500 rpm to 10,000 rpm.

7. Acceleration/Deceleration Rate: Each segment's acceleration/deceleration rate can be set within the range of 100 rpm to 2000 rpm.

8. Coating Time: Each segment's time range is 0-60 seconds.

9. Speed Stability: ±1%.

10. Control Method: PCB microcontroller, button control, LMC LCD display.

11. Heating Method: Carbon Fiber Heating Tube with Independent Temperature Control System, Unrelated to the Main Unit Control.（Model VTC-100PA is Not available）

12. Heating Temperature: Room Temperature - 200°C

13. Heating Power: AC 220V 1000W

14. Temperature Control Accuracy: ±2°C

Product

specifications

1. Dimensions:

450mm×340mm×280mm；

2. Weight: 18kg.

Standard Accessories

Item No.	Product Name	Qty
1	Vacuum Chucks (including O-rings) (Ø19mm and Ø60mm)	2 pieces
2	Centering Locator (including 4 positioning posts)	3 set
3	Filter Plate	1 set
4	Filter Plate Support	1 set
5	Oil-free Vacuum Pump	1 set
6	Rubber Tube (including clamps)	1 set