Slideable 4'' OD RTP Tube Furnace with Rapid Infrared Heating and Cooling Max 1000℃

Installation 

Requirements

This equipment is required to operate under the following conditions: temperature 25°C ± 15°C, humidity 55% Rh ± 10% Rh.

1. Water: The equipment is equipped with a self-circulating cooling water machine (fill with purified water or deionized water).

2. Electricity: AC 380V 50Hz (63A air switch), with a good grounding required.

3. Gas: The equipment chamber needs to be filled with argon gas (purity of 99.99% or higher); an argon gas cylinder must be provided (with a Ø6mm double ferrule connector).

4. Worktable: Dimensions of 1500mm × 600mm × 700mm, with a load capacity of over 200kg.

5. Ventilation System: Required.

Main 

Parameters

1. Power Supply: Single-phase 208V-240V AC, 50Hz/60Hz, 9KW.

2. Quartz Tube: Outer diameter Ø100mm, length 1400mm.

3. Heating Element: Infrared lamp tube.

4. Heating Chamber: Ø100mm × 1400mm.

5. Operating Temperature: Max temperature 1000°C (<1h), continuous temperature 950°C.

6. Temperature Control Accuracy: ±0.5°C.

7. Max Heating Rate: 100°C/s.

8. Cooling Rates: 

   - 8.3°C/s (900°C-600°C) 

   - 4.4°C/s (600°C-500°C) 

   - 2.8°C/s (500°C-400°C) 

   - 1.6°C/s (400°C-200°C) 

   - 0.9°C/s (300°C-200°C).

9. Thermocouple: K-type, Ø6.35mm × 610mm.

10. Sliding Rail: Made of thick steel pipe with chrome plating, automatically controlled by the temperature controller; when the program is complete, the furnace body slides at the set speed. Rail length is 1200mm, sliding speed is 0-70mm/s, sliding distance is 340mm.

11. Vacuum Flange: Stainless steel; water cooling must be used for operation at >900°C, with a cooling water flow rate of 4L/min.

12. Flow Meter: 16ml/min - 160ml/min.

13. Vacuum Level: 10⁻³ torr (mechanical pump), 10⁻⁵ torr (molecular pump).

1. A double-layer steel casing with air cooling keeps the furnace heating longer time up to 1000ºC.

2. IR lamp heating with fast heating rate up to ~50ºC/S

3. One set of sliding rails is installed which allows the furnace to move from one side to the other side automatically at variable speeds using the control knob.

4. Vacuum flanges and the digital vacuum gauge are installed for immediate use.

5. Annealing wafer up to 3 " diameter max         

AC 208-240V Single Phase, 50/60 Hz

9KW

900°C       continuous

Note: RTP furnaces should not be heated for long durations due to thin refractories.

Max. Heating rate: 50  ºC/s

Max. Cooling rate:   8 ºC/s    ( 1000 - 600ºC， via sliding furnace away from sample )

High purity fused quartz tube

4" quartz tube (100 mm O.D x 94 mm I.D x 1400mmL)

Dual sliding rails made of Cr plated steel

Sliding rail length: 1200 mm

Driven by DC motor

Sliding Range: 340mm

Sliding Speed: 0-70 mm/s; adjustable

Automatic sliding is controlled by the temperature controller.  When the heating program is finished, the furnace will slide from right to left at the set speed. Air fans will blow the heated areas to achieve fast cooling.

Vacuum Flanges

Stainless steel vacuum flanges are installed on both ends of the tube.

Right flange:

Hinge-type flange for easy sample loading

1/4"diameter  feedthrough for inserting  K-type thermal couple

Needle valve with barb gas fitting is built-in

Left flange:

The digital vacuum gauge is included

KF25 right angle valve is installed for connecting to a vacuum pump

A needle valve for vacuum release is included

One-year limited manufacturer's warranty (Consumable parts such as processing tubes, o-rings and heating elements are not covered by the warranty, please order replacements at related products below)

CE Certified

NRTL certification(UL61010) or CSA certification is available at extra cost. 

Product 

specifications

Furnace Body 460mm × 330mm × 520mm,  

Furnace and Sliding Rail 1800mm × 450mm × 680mm;  

Weight: 80kg.