Welcome: Supsemi Electronic Technology Co., Ltd
sales@supsemi.com +86-18059149998

Dual Furnace (80mm Dia Tube) with One Furnace Slidable for TCVD Max 1200C

Product Name: Dual RTP Furnace (80mm Dia Tube) with One Furnace Slidable for TCVD Max 1200C

Product Model: OTF-1200X-80-DFSL

Product Description: OTF-1200X-80-DFSL is a system of two 80 mm diameter furnaces with 1200ºC Max working temperature that is designed for growing 2D materials. The left furnace is fixed for sublimation, and the right furnace is slideable to achieve fast heating for deposition and fast cooling rate ( ~100°C/min via pre-heating and sliding).

EMAIL

Product Description

OTF-1200X-80-DFSL is a system of two 80 mm diameter furnaces with 1200ºC Max working temperature that is designed for growing 2D materials. The left furnace is fixed for sublimation, and the right furnace is slideable to achieve fast heating for deposition and fast cooling rate ( ~100°C/min via pre-heating and sliding). The two furnaces have individual temperature controllers without thermal interference. Sublimation temperature can be different from the deposition temperature. It is useful for 2D transition metal dichalcogenide (TMDC) monolayer.


Product Parameters

Product Name

Dual RTP Furnace (80mm Dia Tube) with One Furnace Slidable for TCVD Max 1200C

ModelOTF-1200X-80-DFSL

Sliding Furnace (Right)

Sliding Single-zone Furnace OTF-1200X

Sliding distance: 300 mm

Total heating zone length: 440mm

Constant temperature zone: 150mm (±1 °C) in the center

Heating elements: Fe-Cr-Al Alloy doped by Mo

Max temperature: 1200 °C (<1 hour)

                              1100 °C (continuous)

                              1000°C (under vacuum)

Max heating rate: 10 °C/min

Thermocouple: Type-K

Furnace models and sliding distance can be customized, please contact us for options.

Sliding Single-zone Furnace OTF-1200X.png


Stationary Furnace (Left)Stationary Three-zone Furnace OTF-1200X-III-C

Heating zones: 152.4mm (6") + 152.4mm (6") + 152.4mm (6")

Total heating zone length: 450 mm

Constant Temperature Zone: 200 mm (±1 °C) in the center

Heating elements: Fe-Cr-Al Alloy doped by Mo

Max temperature: 1200 °C (<1 hour)

                              1100 °C (continuous)

                              1000°C (under vacuum)

Max heating rate: 10 °C/min

Thermocouple: Type-K

Furnace can be customized to other available models, please contact us for options

Stationary Three-zone Furnace OTF-1200X-III-C.png

Power of furnace

OTF-1200X: AC 208-240V Single Phase, 50/60 Hz, 3 kW

OTF-1200X-III-C: AC 208-240V Single Phase, 50/60 Hz, 4 kW

Sliding Motor: 208 – 240 VAC Single Phase, 50/60Hz, 200 W


Processing Tube 

High purity fused quartz tube

Size:  80mm O.D x 72mm I.D x 1800mm Length

Max Pressure: 0.4 bar (5.8 psi)

Max flow rate: 1000 sccm

Workflow: right to left


Temperature Controller

1. The FA-YD518P-AG temperature controller is included.

2. Proportional–integral–derivative control (PID control) and auto-tune function

3. 30 segments programmed with ramping, cooling and dwelling steps

4. Built-in over-temperature alarm and thermocouple failure alarm

5. +/- 1 ºC temperature control accuracy

6. Default DB9 PC communication port

7. Four K-type thermal couples are included.

Temperature Controller.jpeg

 Vacuum Flanges

Stainless vacuum flanges with a vacuum gauge are installed on both ends of the tube.

Water cooling flanges are avaiable upon request, if exhaust cooling is needed.

 Sliding Control

1. Double Linear Sliding Rails made of Cr-plated steel

2. Electric motor with manual control of speed and direction

3. Limit switches for motion stop

4. Sliding length: 300 mm


Dimensions

Dimensions: 

Assembly: 2250 mm L × 450 mm W × 680 mm H

Dual Furnace (80mm Dia Tube)  Dimension.jpg


Warranty

One-year limited manufacturer's warranty (Consumable parts such as processing tubes, O-rings and heating elements are not covered by the warranty, please order replacements at related products below).

Dual Furnace (80mm Dia Tube) .jpg

Office Photo

offce photo.jpg

Exhibition

Exhibition.png

Cooperative Partner.jpg

INQUIRY