Dual Sliding Tube Furnace for PECVD with 2” Tube & Flanges Max1200C

Furnace Structure 

1. Both furnaces are double-layer steel structures with 1200°C max. working temperature.

2. Each Furnace has a 200mm heating zone and a 60 mm long constant temperature zone.

3. One pair of sliding rails are installed on the bottom of the furnace, which allows the furnace to be manually moved from side to side with a max sliding distance 400 mm.

4. Vacuum flanges are installed for immediate use.

Power of furnace

 AC 208-240V Single Phase, 50/60 Hz, 20 A air breaker required

 2.5 KW in total

Max. Temperature

1200°C (<1 hour)

Continuous Temperature

1100°C

Heating & Cooling Rates

Heating Rate:

 15°C/sec (RT - 150°C);

 10°C/sec (150°C - 250°C);

  7°C/sec (250°C - 350°C);

  4°C/sec (350°C - 500°C);

  3°C/sec (350°C - 550°C);

  2°C/sec (550°C - 650°C);

  1°C/sec (650°C - 800°C);

 0.5°C/sec (800°C - 1000°C);

Cooling Rate:

15°C/sec (1000 - 950°C);

10°C/sec (950°C - 900°C);

7°C/sec (900°C - 850°C);

4°C/sec (850°C - 750°C);

2°C/sec (750°C - 600°C);

1.5°C/sec (600°C - 500°C);

1°C/sec (500°C - 400°C);

0.5°C/sec (400°C - 300°C);

Note:

The max heating and cooling rate is achieved by pre-heat one side of the processing tube to the target temperature and then slide the furnace to the other side. You may choose to place the sample in the pre-heat area or not.

Heating Zone Length

200mm( ~8")  for each furnace

60 mm (+/-1°C @ 400-1200°C)

Plasma RF Generator

Output Power:          5 -300W adjustable with ± 1% stability

RF frequency:          13.56 MHz ±0.005% stability

Reflection Power:      200W max.

Matching:                 Automatic

RF Output Port:        50 Ω, N-type, female

Noise:                      <50 dB. 

Power:                     208-240VAC, 50/60Hz

Cooling:                   Air cooling.

1. Two furnaces are PID automatic control with 30 programmable segments for precise control of heating rate, cooling rate, and dwell time.

2. Built-in over-temperature alarm and protection allow for operation without an attendant.

3. Two K-type thermal couples are included

4. Temperature Accuracy： +/ - 1°C

1. Double sliding rail made of Cr-plated steel

2. Sliding length: 1200 mm

3. Two slide-stopping clamps are included for holding the position of the furnaces.

Dimensions: 

780mm(L) x 600mm(W) x 710mm(H)

One-year limited manufacturer's warranty (Consumable parts such as processing tubes, O-rings and heating elements are not covered by the warranty, please order replacements at related products below).