CSS RTP Furnace With Rotating Holder for Sublimation Film Coating

Furnace structure

1. Furnace, two temperature controllers, and two-channel gas flowmeters are integrated into a mobile aluminum alloy frame.

2. The chamber is made of high purity fused quartz tube with the dimension of 11" OD/10.8" ID x 9" H.

3. The vacuum flanges are made of Stainless Steel 316 and lifting by an electric motor.

4. Two 5"x5"  IR heating plates and the spacing are adjustable.

5. The top sample holder is rotatable at a speed of 0 - 7 RPM.

Vacuum Flanges

1. Top Flange with one KFD-25 vacuum port and one gas outlet (1/4" pipe required) can slide up or down manually to load and unload substrate and evaporated material easily.

2. The bottom flange has one KFD-25 vacuum port with one gas inlet (1/4" pipe required) with needle valves.

3. The flange is sealed by double silicone o-rings and can achieve max. the vacuum pressure of 10E-2 Torr by a quality mechanical pump and 10E-5 Torr by a molecular pump (vacuum pump is not included, please order separately).

4. One digital vacuum gauge is installed on the top flange.  

5. Precision anti-corrosion digital vacuum gauge is in standard package(Since 2016.03.24).

 1. Two independently controlled heaters with a manually adjustable gap from 2 - 30 mm. 

2. Heaters are made of stainless steel with a water cold jacket to reduce heat radiation and are capable of fast cooling.

3. 5" Dia. the circular wafer holder is built into the top heater for holding the substrate.

4. One set of high thermal-conductive AlN plates (5" Dia. x 0.5mm Thick) are included (place on the back of the substrate to make it heat uniformly).

5. A 58L/min circulating water chiller is included for saving water source ( click the picture below to see detailed specs).

6. The top sample holder is rotatable at an adjustable speed  0 - 7 RPM

7. 20 pcs Halogen lamps are used as the heating element for rapid thermal processing.

1. Two precision digital temperature controllers with 30 segments programmable offer independent controlling of top and bottom heaters.

2. Each controller has a PID autotune function to protect heaters from overshooting and an alarm function to prevent overheating from damaging the thermal couples.

3. PC communication interface & software are installed for (click the picture below for details) recording temperature profile shown as below.

Working Temperature

1. The maximum temperature for each heater: ≤ 800ºC.

2. The maximum temperature difference between the two heaters: ≤ 300ºC depends on the spacing between the two heaters:

- Spacing 30mm     Max. temp difference:  315ºC @ heating bottom only

 Heating: < 8ºC/s ( heating single heater only )

Cooling: < 10ºC/s (600 - 100ºC) Max.

Working Voltage

208 - 240VAC, single-phase, 50A air breaker 

One year limited with lifetime support.

( Consumable parts such as quartz tube and heating lamps are not covered by the warranty)