CSS and RTP Furnace With Rotating Holder for Film Coating Max 12

Furnace structure

 1. The Vacuum chamber ( 20" ID) is made of  Stainless steel to reach 10-5 torr via turbopump

2. Two 12"  IR heating plates are located on the top of the bottom inside the chamber

3. The top sample holder is rotatable at a speed of 1 - 10 RPM for uniform film deposition

4. Max. working temperature is 950ºC and  The heating rate can reach 1200oC/minute max.

5. Eurotherm precision temperature controller with +/- 0.1oC accuracy

6. Touch Screen Computer control for all processing parameters

Vacuum Flanges

1. Chamber dimension: ID 500mm x H 460mm

2. Two 60mm dia quartz windows are built for easy observation.

3. One air-tight sliding baffle is built-in for blocking the evaporation source under high vacuum/

4. A precision anti-corrosion digital vacuum gauge is in the standard package

1. Two IR heaters are located on top and bottom of the chamber with adjustable gaps from 2 - 25 mm. (Pic. 1)

2. Heaters are made of stainless steel with a water cold jacket to keep heat insulation.

3. 12 " Dia. the circular wafer holder is built into the top heater for holding the substrate.

4. The graphite plates are placed on the top of the IR heater to make heating more uniform (Pic. 2)

5. The top sample holder is rotatable at an adjustable speed from 1 - 10 RPM

6. A 58L/min circulating water chiller is included for cooling heaters  

pic.1   pic.2

1. Two Eurotherm 3000 digital temperature controllers with 24 segments programmable offer independent controlling of top and bottom heaters with +/- 0.1ºC accuracy.

2. All operations, such as temperature profiles, vacuum pressure, rotation speed,  rotation speed and lifting of the flange are controlled by a touch screen computer via a PLC.

3. The computer can show the temperature and vacuum profiles and star 10 pre-set programs of processing.

Working Temperature

1. Max. temperature for each heater: ≤ 950ºC.

2. Max. the temperature difference between the two heaters: ≤ 300ºC 

3. Max. Heating: < 8ºC/s ( heating single heater only )

4. Max. Cooling: < 20 ºC/s (600 - 100ºC) Max. 

Heating: < 8ºC/s ( heating single heater only )

Cooling: < 10ºC/s (600 - 100ºC) Max. 

Power

 208 - 240VAC, three phases, 50/60 Hz  ( 380V AC 3 phase is available )

60 KW max.  ( 200A breaker needed )

A power cable is included, but no plug

Dimensions：L 1450 X W 1250 X H2100 mm     

Weight: 490 Kg

One year limited with lifetime support.

( Consumable parts such as quartz tube and heating lamps are not covered by the warranty)