Dual-Zone CSS RTP Furnace for PVD or Close-Spaced Sublimation Film Coating

Furnace structure & 

Vacuum Chamber

1. A dual Heater, two temperature controllers, and two-channel gas flowmeters are integrated into a mobile aluminum alloy frame

2. The chamber is made of high purity fused quartz tube

3. Quartz tube size: 11" OD/10.8" ID x 9" H

4. Carbon fiber felt as thermal insulation

5. The vacuum flanges are made of Stainless Steel 316

6. Overall dimension: 850(L)×745(W)×1615(H) mm

Vacuum Flanges

1. Top Flange with one KFD-25 vacuum port and two gas outlets (1/4" pipe required) can slide up or down manually to load and unload substrate and evaporated material easily

2. The bottom flange has one KFD-25 vacuum port with two gas inlets (1/4" pipe required) and needle valves

3. The flange is sealed by double silicone o-rings and can achieve maximum vacuum pressure of 10E-2 Torr by a quality mechanical pump and 10E-5 Torr by a molecular pump 

4. Precision anti-corrosion digital vacuum gauge is in standard package (Since 2016.03.24).

1.Two shortwave IR lamps as heating elements for fast heating.

2. The distance between two heaters is adjustable from 10 - 50 mm

3. The heaters are made of stainless steel with a water cold jacket to reduce heat radiation and allow for fast cooling

3" round wafer holder is built-in with the top heater to load the substrate

4. One high thermal conductive AlN plate (3"Dia x 0.5mm Thick) is included, which shall put on the back of the substrate to make it heated uniformly

5. One 3" graphite plate can be used alternatively for the AIN plate, please contact us to order.

 1. Two precision digital temperature controllers with 30 segments programmable offer independent controlling of top and bottom heaters

2. Each controller has PID auto-tune function to protect heaters from overshooting and alarm function to avoid overheating and the thermal couple broke

3. PC communication interface & software is installed.

Working Temperature

Maximum temperature for each heater: <= 650ºC

The maximum temperature difference between two heaters: <= 300ºC depends on the spacing between two heaters:

- Spacing 30mm       Max. temp difference:  315ºC @ heating bottom only

- Spacing 40mm       Max. temp difference:  350ºC @ heating bottom only

- Spacing 50mm       Max. temp difference:  395ºC @ heating bottom only

Heating: < 8ºC/s ( heating single heater only )

Cooling: < 10ºC/s (600 - 100ºC) Max.

Working Voltage

208 - 240VAC, single-phase, 20A air breaker

One year limited with lifetime support.

( Consumable parts such as quartz tube and heating lamps are not covered by the warranty)