Compact Hydrogen Tube Furnace For The Heat Treatment Of Oxidation-Sensitive Materials

Working Temperature

• 100~1100°C (Continuous)

• 1200°C (<1 hour) 

 <= 20°C /min

Tube Furnace

• One 60mm/80mm high-quality quartz tube.

• Two fibrous ceramic tube blocks are included for blocking heat radiation from the tube chamber. • (Two Ceramic blocks must be fully inserted into the furnace chamber before heating)

• Quartz blocks (optional) are ideal for cleaner and higher vacuum efficiency.             

• Two heating zones: 8” (200 mm) heating length for each zone, 16" (400 mm) total heating area. 

• Double-layer steel casing with air cooling.

• The hydrogen gas furnace must be placed under a fume hood which is not included. 

• Built-in PID auto-tune function with overheating & broken thermocouple protection

• Over-temperature protection and alarm allows for operation without attendant(s)

• Precise temperature control with less than 1 ℃ temperature fluctuation during the dwelling.

Temperature 

Uniformity

• 150mm (+/-1°C) heating area with the best temperature uniformity for each heating zone. 

• A longer area of temperature uniformity (~ 250mm) can be created by setting both zones at the same temperature

• Flanges with 1/4” tube fittings and mechanical valves are included on both sides.

• Flange fixtures and tube covers are installed to provide additional safety protection in case of hydrogen hazards. It is easy to open one side of the flange for quick sample loading

• Flange with an additional 1/4" thermocouple feedthrough is available at an extra cost for in-situ temperature calibration and measurements.

• Flange with KF25 port is also available at an extra cost for a quick connection with a vacuum pump.

• Water-cooled flanges at an extra cost are required if thermal blocks are not inserted. 

• The tube furnace comes with a pressure gauge and 0 - 1000 ml/min floating flow meter to precisely control the overall pressure and flow rate in the quartz tube. 

• Two separated gas delivery lines for hydrogen and inert gases.

• The inert gas line comes with a mechanical needle valve.

• The hydrogen line comes with a mechanical needle valve and a solenoid valve controlled by the hydrogen gas detector.  

Hydrogen Torch

• 1/4" O.D. stainless steel tube on the right side is installed as a hydrogen torch with a manual light to safely burn out the hydrogen exhaust. 

Hydrogen 

Detector System

• One Honeywell UL Approved Sensepoint Gas Detector is Integrated into the system.

• Working Temperature Range:   40ºF to +149ºF (-40ºC to +65ºC)

• Alarm Point: H2 Limited Explosive Line 20% (20% LEL).  

• Once detecting H2 gas beyond the point, it will shut off the inlet valve to the H2 automatically.

One-year limited warranty for electrical and mechanical parts.  (Consumable parts such as sample plates and heating elements are not covered by the warranty, please order the replacement for related products below.)

ATTENTION: Any damages caused by the use of corrosive and acidic gases are not under the coverage of SUPSEMI One Year Limited Warranty.