Hydrogen Gas Tube Furnace Max 1700C with 60mm Alumina Tube and Hydrogen Detector

• 3 KW Max. ( 20A breaker required)  

Voltage

• AC 208-240 Single Phase, 50/60 Hz

Max. Temperature

1700°C  ( < 1 hour )

 Continuous Temperature

1600°C

Max. Heating Rate

 <= 10°C /min (5C/min is recommended to avoid thermal-shocking the alumina tube)

Processing Tube

• High purity Al2O3 ceramic tube, Purity > 95%

• 51 mm (I.D) x 60 mm (O.D) x 800 mm length.

• Two fibrous ceramic tube blocks are included for blocking heat radiation from inside the tube (Ceramic blocks must be fully inserted into the furnace chamber before heating).

• Quartz blocks (optional) are ideal for a clean processing environment and higher vacuum efficiency.

• For 60mm tubes, it is recommended that customers purchase two pairs of tube support to prevent the tube from bending under high temperature

• 125 mm (5")

Constant temp. zone

• 50 mm  (2")   within ± 2°

• PID automatic control via SCR (Silicon Controlled Rectifier) power control with phase angle fired, current limiting resistor.

• 30 programmable segments for precise control of heating rate, cooling rate and dwell time.

• Built-in over-temperature alarm and protection allow for operation without an attendant.

• +/- 1 ºC temperature accuracy.

• RS485 Communication Port.

• MET certified 30 programmable segments for precise control of heating rate, cooling rate and dwell time.

• Built-in PID Auto-Tune function with overheating & broken thermocouple protection.

• Over-temperature protection and alarm allow for operation without attendant(s).

• +/- 1 ºC temperature accuracy.

• RS485 Communications Port.

• One solenoid valve is installed on the left of the flange for Hydrogen gas inlet. It connects with hydrogen detector. Once hydrogen gas leak is detected (10% below hydrogen explode point), gas inlet valve will be shut down immediately.

• One pressure gauge is installed on the end of the gas inlet. Hydrogen gas pressure must be controlled under 5 PSI, which can be adjusted by a stainless steel needle valve.

• One 16 -160 ml/min floating meter is installed on gas-outlet end for adjusting the gas flow rate.

• 1/4" Dia stainless steel tube is installed for burning hydrogen gas during gas flowing.

• One long lighter is included in the standard package for igniting hydrogen gas manually.

• One 6" long neck flexes safe lighter is included for lighting hydrogen gas.

Hydrogen Detector 

System

• One Honeywell UL Approved Sensepoint Gas Detector is Integrated into the system.

• Working Temperature Range:   40ºF to +149ºF (-40ºC to +65ºC)

• Alarm Point: H2 Limited Explosive Line 20% (20% LEL).  

• Once detecting H2 gas beyond the point, it will shut off the inlet valve to the H2 automatically.

One-year limited warranty for electrical and mechanical parts.  (Consumable parts such as sample plates and heating elements are not covered by the warranty, please order the replacement for related products below.)

ATTENTION: Any damages caused by the use of corrosive and acidic gases are not under the coverage of SUPSEMI One Year Limited Warranty.