Spin Coating Machine with Vacuum Pump

Product Name: Lab Spin Coater Acid and Alkali Resistant with Vacuum Pump

Product Model: VTC-200PV

Product Description: The machine can evacuate the chamber of the coating machine, allowing samples to be coated in a complete vacuum state. This is suitable for the use of thin film materials that are prone to oxidation and deterioration in air. When evacuating the chamber, the sample is secured using a sample holder.

Product Description

The VTC-200PV Vacuum Rotary Coater is suitable for surface coating processes in semiconductors, crystals, optical discs, and photomasks. This machine can be used for the preparation of coatings with strong acid and strong alkaline solutions. It can evacuate the coating chamber, allowing samples to be coated in a complete vacuum state, which is ideal for thin film materials that are prone to oxidation and deterioration in air. During the evacuation of the chamber, a sample holder is used to secure the samples.

When the VTC-200PV is not evacuating the chamber, it utilizes a vacuum chuck to hold the samples in place. This equipment can store 12 sets of programs, each containing 6 operational stages. The device rotates at different speeds during the various stages, gradually increasing to the maximum speed, which helps ensure an even film formation on the sample surface without excessive waste, saving materials.

The VTC-200PV Vacuum Rotary Coater is easy to operate, convenient to clean, and compact in size, making it primarily applicable in the laboratories of universities and research institutions for the thin film generation process.

Product Features

1. The device is equipped with 12 program sets, each containing 6 operating stages. The acceleration and deceleration rate settings range from 100 to 2000 rpm/s, and the time range for each stage is from 0 to 60 seconds.

2. Samples are fixed using a vacuum adsorption method, which is simple to operate.

3. The vacuum degree of the suction cup can reach -0.08 MPa.

4. A positioning tool allows for easy placement of samples in the center position, reducing vibration or chipping caused by eccentricity.

5. Different suction cups can be used based on the specifications of the samples, and changing them is convenient and straightforward.

6. The motor uses a 24V DC brushless motor with stepless speed regulation, ensuring high reliability and strong adaptability. It is easy to maintain, generates low noise, has minimal vibration, operates smoothly, and starts quickly and stably. After acceleration, the operation remains stable, ensuring consistency and uniformity in coating thickness.

7. The machine can be placed inside a glove box, but the control section and vacuum pump must be located outside.

8. Coatings can be performed in an inert gas atmosphere (such as Ar or N2).

9. An oil-free double-acting vacuum pump is used, which is compact, simple in structure, easy to operate, convenient to maintain, and environmentally friendly.

10. The chamber is made of polypropylene material, providing a longer service life and improved chemical corrosion resistance and excellent stress crack resistance.

11. The system features an all-English operating interface.

12. It has a cover protection function; if the upper lid is opened during the coating process or after coating is completed, the machine will quickly decelerate until it stops.

13. The controller uses a single control box with an LCD display for more intuitive and reliable readings.

Product Parameters

Product Name	Spin coating machine with Vacuum Pump
Product Model	VTC-200PV
Installation Conditions	1. Temperature and Humidity: 10-85% RH (at 25°C, no condensation); Temperature: 0-45°C. 2. Environment: No strong vibration sources or corrosive gases in the vicinity of the equipment. 3. Water: The equipment is equipped with a drainage outlet. 4. Power: Single-phase: AC 220V, 50Hz, national standard three-prong socket, 10A, must have good grounding. 5. Gas: Vacuum negative pressure (vacuum pump), with a pumping flow rate of no less than 70L/min (the equipment can be protected by inert gas). 6. Worktable: Recommended dimensions are 800X600X700mm, with a load capacity of over 100KG (solid cement table is preferable). 7. Ventilation: No special requirements.
Main Parameters	1. Power Interface: Equipped with a fuse power socket: AC220V 50Hz, fuse specification: 10A, φ5×20mm 2. Total Power: ≤600W (including the linked "oil-free vacuum pump" of 450W) 3. Main Chamber Material: Polypropylene 4. Sample Holder (Chucks + Suction Cups): Standard configuration: 1 chuck-type sample holder (variable sizes: 2", 3", 4") and 1 Φ100 polypropylene vacuum suction cup 5. Operating Mode: Can store 12 sets of programs, each containing 6 operational stages 6. Coating Speed: Effective range of 500-6000 rpm 7. Acceleration/Deceleration per Stage: Adjustable range: 100—2000 rpm/s 8. Time per Stage: Adjustable range: 0-60 s 9. Speed Stability: ±1% 10. Control Method: PCB microcontroller with button control and LMC LCD display 11. Product Specifications: - Dimensions: Main unit: Φ250mm×360mm; Control box: 330mm×380mm×150mm - Weight: 25 kg 12. Supporting Equipment: - Oil-Free Vacuum Pump (Sample Vacuuming): - Model: AP-1400C/V, powered via the main unit’s socket - Voltage parameters: AC220V 50/60Hz, 2A, 0.45KW - Ultimate vacuum: -0.0933MPa, flow rate: 150L/min - Mechanical Vacuum Pump (Coating Chamber Vacuuming): - Model: VRD-8, powered via an independent socket - Voltage parameters: AC220V 50Hz, 2.5A, 0.4KW - Ultimate vacuum: 5X10⁻²Pa, flow rate: 8m³/h

Standard Accessories

Item No.	Product Name	Qty
1	Φ100 mm Vacuum Suction Cup	1 set
2	Chuck Plates: 2", 3", 4"	1 set
3	Center Positioner (Includes 4 fixed positions)	1 set
4	Dispensing Device	1 set
5	Oil-Free Vacuum	1 set
6	Double-Stage Mechanical Vacuum Pump VRD-8	1 set