Lab Spin Coating Machine Acid and Alkali Resistant for Semicon Crystal

Product Name: Lab Spin Coater Acid and Alkali Resistant for Semicon Crystal

Product Model: VTC-200P

Product Description: The TC-200P Vacuum Spin Coater is suitable for surface coating processes in semiconductors, crystals, optical discs, and photomasks. This machine can be used for the preparation of coatings with strong acid and strong alkaline solutions. The VTC-200P Vacuum Spin Coater chamber cannot be evacuated; during operation, it uses a vacuum plate to hold the samples securely on the sample holder. This device can store 12 program sets, each containing 6 operating stages.

Product Description

The VTC-200P Vacuum Spin Coater is suitable for surface coating processes in semiconductors, crystals, optical discs, and photomasks. This machine can be used for the preparation of coatings with strong acid and strong alkaline solutions. The VTC-200P Vacuum Spin Coater chamber cannot be evacuated; during operation, it uses a vacuum plate to securely hold the samples on the sample holder. This device can store 12 program sets, each containing 6 operating stages.

Different operating stages have different rotation speeds, allowing the device to gradually increase the speed to the maximum, which helps achieve a uniform film formation on the sample surface without excessive waste, thereby saving materials. The upper cover of the chamber can heat the samples (optional feature), which is beneficial for the coating process of viscous film materials. The VTC-200P Vacuum Spin Coater is simple to operate, easy to clean, and compact, making it primarily used in laboratories of universities and research institutes for film generation processes.

Product Features

1. The device is equipped with 12 program sets, each containing 6 operating stages. The acceleration and deceleration rate settings range from 100 to 2000 rpm/s, and the time range for each stage is from 0 to 60 seconds.

2. Samples are fixed using a vacuum adsorption method, which is simple to operate.

3. The vacuum degree of the suction cup can reach -0.08 MPa.

4. A positioning tool allows for easy placement of samples in the center position, reducing vibration or chipping caused by eccentricity.

5. Different suction cups can be used based on the specifications of the samples, and changing them is convenient and straightforward.

6. The motor uses a 24V DC brushless motor with stepless speed regulation, ensuring high reliability and strong adaptability. It is easy to maintain, generates low noise, has minimal vibration, operates smoothly, and starts quickly and stably. After acceleration, the operation remains stable, ensuring consistency and uniformity in coating thickness.

7. The machine can be placed inside a glove box, but the control section and vacuum pump must be located outside.

8. Coatings can be performed in an inert gas atmosphere (such as Ar or N2).

9. An oil-free double-acting vacuum pump is used, which is compact, simple in structure, easy to operate, convenient to maintain, and environmentally friendly.

10. The chamber is made of polypropylene material, providing a longer service life and improved chemical corrosion resistance and excellent stress crack resistance.

11. The system features an all-English operating interface.

12. It has a cover protection function; if the upper lid is opened during the coating process or after coating is completed, the machine will quickly decelerate until it stops.

13. The controller uses a single control box with an LCD display for more intuitive and reliable readings.

Product Parameters

Product Name	Vacuum Spin Coater for Thin Film Generation Laboratory
Product Model	VTC-200P
Installation Conditions	1. Temperature and Humidity: 10-85% RH (at 25°C, no condensation); Temperature: 0-45°C. 2. Environment: No strong vibration sources or corrosive gases in the vicinity of the equipment. 3. Water: The equipment is equipped with a drainage outlet. 4. Power: Single-phase: AC 220V, 50Hz, national standard three-prong socket, 10A, must have good grounding. 5. Gas: Vacuum negative pressure (vacuum pump), with a pumping flow rate of no less than 70L/min (the equipment can be protected by inert gas). 6. Worktable: Recommended dimensions are 800X600X700mm, with a load capacity of over 100KG (solid cement table is preferable). 7. Ventilation: No special requirements.
Main Parameters	1. Power Connection: Power socket with fuse: AC220V 50Hz; fuse specification: 10A, φ5×20mm (this device supports customization for AC110V 50/60Hz products). 2. Total Power: ≤150W (excluding external vacuum pump). 3. Coating Main Chamber Material: Polypropylene. 4. Sample Holder (Suction Cup): One Φ100 polypropylene vacuum suction cup (if equipped with heating function, it is made of PTFE). 5. Operating Mode: Can store 12 program sets, each containing 6 operating stages. 6. Coating Speed: 500rpm-6000rpm. 7. Acceleration and Deceleration Rate: Each stage's acceleration and deceleration setting range: 100 rpm —2000 rpm. 8. Coating Time: Time range for each stage: 0-60s. 9. Speed Stability: ±1%. 10. Control Method: PCB microcontroller with button control and LMC LCD display. 11. Heating Method: Standard equipment does not have this function (this machine can optionally be customized to add a heating function, with an independent temperature control system not related to the main control). 12. Heating Temperature: Customizable maximum temperature: RT-100℃. 13. Heating Power: AC220V 1000W. 14. Temperature Control Accuracy: ±2℃.
Product Specifications	Dimensions: - Main Unit: Φ250mm x 360mm - Control Box: 330mm x 380mm x 150mm Weight: 15kg

Standard Accessories

Item No.	Product Name	Qty
1	Φ100mm Vacuum Suction Cup	1 set
2	Oring	1 set
3	Centering Device (Includes 4 Positioning Columns)	1 set
4	Liquid Reservoir	1 set
5	Liquid Reservoir Support	1 set
6	Oilfree Vacuum Pump	1 set