Max 1200C Auto Slidable PECVD Furnace System with Tube Vacuum Pump for Laboratory

Product Model: OTF-1200X-PEC4LV

Product Description: OTF-1200X-50S-PESL is an affordable and compact PE-CVD (Plasma Enhanced Chemical Vapor Deposition) tube furnace system with a slideable mechanism. It consists of a 300W RF plasma generator, a 2"O.D split tube furnace, and the integrated slidable rail

Product Description

This PECVD Furnace system can be updated to an advanced model with options. It is an ideal tool for the researcher to make innovations under a limited budget.

• Lower temperature processing compared to conventional CVD.

• High heating & cooling rate using sliding furnace

• Film stress can be controlled by high/low frequency mixing techniques.

• Control over stoichiometry via process conditions.

• Can do a wide range of material deposition, including SiOx, SiNx, SiOxNy and Amorphous silicon (a-Si:H) deposition.

Product Parameters

Auto-Sliding Split

Tube furnace

• Input power: 208 – 240V AC, 1.2kW

• 1200°C Max. working temperature for < 60 minutes

• 1100°C Max for continuous heating

• High purity quartz tube 2"OD x 1.7"ID x 39.4" Length

• 30 segments programmable precision digital temperature controller

• 8" (200mm), single-zone. 2.3" (60mm) (+/-1°C) @ 1000°C

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Plasma RF Generator

• Output Power: 5 -300W adjustable with ± 1% stability

• RF frequency: 13.56 MHz ±0.005% stability

• Reflection Power: 200W max.

• Matching: Automatic

• RF Output Port: 50 Ω, N-type, female

• Noise: <50 dB.

• Power: 208-240VAC, 50/60Hz

• Cooling: Air cooling.

Vacuum Flanges

and Fittings

• The vacuum flange set is made of stainless steel 304.

• Left flange assembly includes a KF-25 vacuum port, two KF-25 quick clamps, a KF-25 right-angle valve, a KF-25 vacuum bellows, flange support, 3/8 O.D barbed fitting, and a needle valve.

• Right flange assembly includes a digital Pirani gauge, 1/4 O.D tube fitting, 1/4" feedthrough, a needle valve, and a KF-16 quick clamp set

Vacuum Pump

• 208 - 240V / 50-60 Hz (750W Max.)

• 220 liters / M or 7.8 CFM

• Oil Mist Eliminator is included

• Max. vacuum: 3 X 10E-3 torr

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Dimensions

Dimensions:

• Overall Dimensions: 1500mm x 600mm x 1200mm (all system, L x W x H)

• Net weight: 350 lbs

• Shipping weight: 480 lbs

Warranty

One-year limited manufacturer's warranty (Consumable parts such as processing tubes, O-rings and heating elements are not covered by the warranty, please order replacements at related products below).

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